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Method of forming borderless contacts |
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2006-09-26 |
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Plasma reactor using inductive RF coupling, and processes |
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Magnetic confinement in a plasma reactor having an RF bias electrode |
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2002-09-03 |
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Plasma reactor with heated source of a polymer-hardening precursor material |
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High temperature silicon surface providing high selectivity in an oxide etch process |
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2002-06-04 |
| 6251792 |
Plasma etch processes |
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Plasma reactor with heated source of a polymer-hardening precursor material |
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Oxide etch process with high selectivity to nitride suitable for use on surfaces of uneven topography |
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2001-02-27 |
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High selectivity oxide etch process for integrated circuit structures |
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2001-01-09 |
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Process used in an RF coupled plasma reactor |
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Plasma reactor with heated source of a polymer-hardening precursor material |
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Plasma reactor with heated source of a polymer-hardening precursor material |
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Plasma reactor with heated source of a polymer-hardening precursor material |
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Plasma reactor and processes using RF inductive coupling and scavenger temperature control |
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1999-03-30 |
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Silicon scavenger in an inductively coupled RF plasma reactor |
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Selectivity for etching an oxide over a nitride |
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1995-06-13 |
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Etching titanium nitride using carbon-fluoride and carbon-oxide gas |
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1995-03-21 |
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Reactor chamber self-cleaning process |
David Cheung, Jerry Wong |
1992-10-27 |