Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5753133 | Method and apparatus for etching film layers on large substrates | Jerry Wong, Kam S. Law, Dan Maydan, Norman L. Turner | 1998-05-19 |
| 5585729 | Fluid concentration detecting apparatus | Hiroji Hanawa, Jerry Wong | 1996-12-17 |
| 5556501 | Silicon scavenger in an inductively coupled RF plasma reactor | Kenneth S. Collins, Craig A. Roderick, John Trow, Chan-Lon Yang, Jerry Wong +7 more | 1996-09-17 |
| 5308417 | Uniformity for magnetically enhanced plasma chambers | David W. Groechel, Robert Steger, Jerry Wong, Tetsuya Ishikawa, Regga Tekeste +2 more | 1994-05-03 |
| 5292393 | Multichamber integrated process system | Dan Maydan, Sasson Somekh, David N. Wang, David Cheng, Isaac Harari +1 more | 1994-03-08 |
| 5288645 | Hydrogen evolution analyzer | Jerry Wong | 1994-02-22 |
| 5186594 | Dual cassette load lock | Phil Salzman, Steven Murdoch, Cheng Wang, Mark A. Stenholm, James Howard +2 more | 1993-02-16 |
| 4951601 | Multi-chamber integrated process system | Dan Maydan, Sasson Somekh, David N. Wang, David Cheng, Isaac Harari +1 more | 1990-08-28 |
| 4785962 | Vacuum chamber slit valve | — | 1988-11-22 |