Issued Patents All Time
Showing 1–25 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8828886 | Low dielectric constant insulating film and method for forming the same | Seiji Samukawa, Shigeo Yasuhara, Tsutomu Shimayama, Hisashi Yano, Kunitoshi Tajima +2 more | 2014-09-09 |
| 6943104 | Method of etching insulating film and method of forming interconnection layer | Masanaga Fukasawa | 2005-09-13 |
| 6805973 | Aluminum nitride/aluminum base composite material and a method for producing thereof | Kei Takatsu, Shinsuke Hirano, Nobuyuki Suzuki | 2004-10-19 |
| 6668905 | Aluminum nitride/aluminum base composite material and method of producing the same | Kei Takatsu, Shinsuke Hirano, Nobuyuki Suzuki | 2003-12-30 |
| 6645852 | Process for fabricating a semiconductor device having recess portion | Mitsuru Taguchi, Miyata Koji | 2003-11-11 |
| 6638848 | Method of etching insulating film and method of forming interconnection layer | Masanaga Fukasawa | 2003-10-28 |
| 6391437 | COMPOSITE MATERIAL AND MANUFACTURING METHOD THEREOF, SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD THEREOF, SUBSTRATE MOUNTING STAGE AND MANUFACTURING METHOD THEREOF, AND SUBSTRATE PROCESSING METHOD | Kei Takatsu, Shinsuke Hirano | 2002-05-21 |
| 6380065 | Interconnection structure and fabrication process therefor | Naoki Komai, Mitsuru Taguchi, Akira Yoshio, Takaaki Miyamoto | 2002-04-30 |
| 6352937 | Method for stripping organic based film | Jerry Wong, Masato Toshima | 2002-03-05 |
| 6191031 | Process for producing multi-layer wiring structure | Mitsuru Taguchi | 2001-02-20 |
| 6174408 | Method and apparatus for dry etching | Tomohide Jozaki, Shinsuke Hirano | 2001-01-16 |
| 6120661 | Apparatus for processing glass substrate | Shinsuke Hirano, Kei Takatsu | 2000-09-19 |
| 6096160 | Helicon wave plasma processing apparatus | — | 2000-08-01 |
| 6063710 | Method and apparatus for dry etching with temperature control | Tomohide Jozaki, Shinsuke Hirano | 2000-05-16 |
| 5994226 | Dry etching method | — | 1999-11-30 |
| 5981913 | Static electricity chuck and wafer stage | Tomohide Jozaki, Shinsuke Hirano, Kinya Miyashita, Seiichirou Miyata, Yoshiaki Tatsumi | 1999-11-09 |
| 5968273 | Wafer stage for manufacturing a semiconductor device | Tomohide Jozaki, Shinsuke Hirano, Kinya Miyashita, Yoshiaki Tatsumi, Seiichirou Miyata | 1999-10-19 |
| 5962084 | Plasma CVD process and semiconductor device having metal film formed by the process | Takaaki Miyamoto, Atsushi Kawashima | 1999-10-05 |
| 5738752 | System and method for plasma etching | — | 1998-04-14 |
| 5662819 | Plasma processing method with controlled ion/radical ratio | — | 1997-09-02 |
| 5599742 | Interconnection forming method | — | 1997-02-04 |
| 5567268 | Plasma processing apparatus and method for carrying out plasma processing by using such plasma processing apparatus | — | 1996-10-22 |
| 5540812 | Dry etching method | — | 1996-07-30 |
| 5429710 | Dry etching method | Hari Akiba | 1995-07-04 |
| 5401358 | Dry etching method | — | 1995-03-28 |