| 8469342 |
Substrate suction apparatus and method for manufacturing the same |
Yoshiaki Tatsumi |
2013-06-25 |
| 8238072 |
Bipolar electrostatic chuck |
Hiroshi Fujisawa |
2012-08-07 |
| 8196594 |
Apparatus for removing foreign material from substrate and method for removing foreign material from substrate |
Riichiro Harano, Yoshiaki Tatsumi, Hiroshi Fujisawa |
2012-06-12 |
| 8158238 |
Electrostatic chuck and electrode sheet for electrostatic chuck |
Hiroshi Fujisawa, Riichiro Harano |
2012-04-17 |
| 8051548 |
Method of manufacturing an electrostatic chuck |
Yoshihiro Watanabe |
2011-11-08 |
| 8027171 |
Feeding structure of electrostatic chuck, method for producing the same, and method for regenerating feeding structure of electrostatic chuck |
Yoshihiro Watanabe |
2011-09-27 |
| 7881036 |
Electrode sheet for electrostatic chuck, and electrostatic chuck |
Hiroshi Fujisawa |
2011-02-01 |
| 7567421 |
Bipolar electrostatic chuck |
— |
2009-07-28 |
| 7411773 |
Electrostatic chucking device and manufacturing method thereof |
Yoshiaki Tatsumi |
2008-08-12 |
| 7300707 |
Aluminium composite structure having a channel therein and method of manufacturing the same |
Yoshiaki Tatsumi |
2007-11-27 |
| 6813134 |
Electrostatic chucking device and manufacturing method thereof |
Yoshiaki Tatsumi |
2004-11-02 |
| 5981913 |
Static electricity chuck and wafer stage |
Shingo Kadomura, Tomohide Jozaki, Shinsuke Hirano, Seiichirou Miyata, Yoshiaki Tatsumi |
1999-11-09 |
| 5968273 |
Wafer stage for manufacturing a semiconductor device |
Shingo Kadomura, Tomohide Jozaki, Shinsuke Hirano, Yoshiaki Tatsumi, Seiichirou Miyata |
1999-10-19 |
| 5667822 |
Shaping mold for making ultra-thin shaped rubber articles |
Tomoyuki Hayashi, Yoshiaki Tatsumi |
1997-09-16 |
| 5595704 |
Method of using a shaping mold for making ultra-thin shaped rubber articles |
Tomoyuki Hayashi, Yoshiaki Tatsumi |
1997-01-21 |