Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5981913 | Static electricity chuck and wafer stage | Shingo Kadomura, Tomohide Jozaki, Shinsuke Hirano, Kinya Miyashita, Yoshiaki Tatsumi | 1999-11-09 |
| 5968273 | Wafer stage for manufacturing a semiconductor device | Shingo Kadomura, Tomohide Jozaki, Shinsuke Hirano, Kinya Miyashita, Yoshiaki Tatsumi | 1999-10-19 |