| 7036673 |
Lot management production method and product carrying container |
— |
2006-05-02 |
| 6655000 |
Lot management production method and product carrying container |
— |
2003-12-02 |
| 6320737 |
Electrostatic chucking device |
Shinsuke Hirano |
2001-11-20 |
| 6235655 |
Semiconductor manufacturing system and semiconductor manufacturing method |
— |
2001-05-22 |
| 6204193 |
Method for etching |
— |
2001-03-20 |
| 6174408 |
Method and apparatus for dry etching |
Shingo Kadomura, Shinsuke Hirano |
2001-01-16 |
| 6084763 |
Method of holding wafer, method of removing wafer and electrostatic chucking device |
Shinsuke Hirano |
2000-07-04 |
| 6063710 |
Method and apparatus for dry etching with temperature control |
Shingo Kadomura, Shinsuke Hirano |
2000-05-16 |
| 5981913 |
Static electricity chuck and wafer stage |
Shingo Kadomura, Shinsuke Hirano, Kinya Miyashita, Seiichirou Miyata, Yoshiaki Tatsumi |
1999-11-09 |
| 5968273 |
Wafer stage for manufacturing a semiconductor device |
Shingo Kadomura, Shinsuke Hirano, Kinya Miyashita, Yoshiaki Tatsumi, Seiichirou Miyata |
1999-10-19 |
| 5431769 |
Method and system for plasma treatment |
Toshiro Kisakibaru, Akira Kojima, Takayuki Fukunaga, Yoshinori Hata, Yasushi Kato +2 more |
1995-07-11 |