Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11765810 | Soft X-ray static electricity removal apparatus | Kouta Ueno, Makoto Yoshida, Nobuyuki Uesugi, Naoji Iida | 2023-09-19 |
| 11480352 | Device for measuring clogging of filter in air conditioner and air conditioner | Isao Honbori, Akira Yamazaki | 2022-10-25 |
| 10508261 | Cultured algae water concentration system, method for operating cultured algae water concentration system, and method for concentrating algae water containing cultured algae | Motosuke Suzuki | 2019-12-17 |
| 6777355 | Manufacturing apparatus and manufacturing method for semiconductor device | Isao Honbori, Yasushi Kato, Toshikazu Suzuki, Hirohisa Koriyama, Hayato Iwamoto +1 more | 2004-08-17 |
| 6670290 | Manufacturing apparatus and manufacturing method for semiconductor device | Isao Honbori, Yasushi Kato, Toshikazu Suzuki, Hirohisa Koriyama, Hayato Iwamoto +1 more | 2003-12-30 |
| 6255220 | Method and apparatus for plasma control | Akira Kojima, Yasushi Kato, Isao Honbori, Satoshi Bannai, Tomohiro Chiba +1 more | 2001-07-03 |
| 5945008 | Method and apparatus for plasma control | Akira Kojima, Yasushi Kato, Isao Honbori, Satoshi Bannai, Tomohiro Chiba +1 more | 1999-08-31 |
| 5928077 | Clean room for manufacturing of semiconductor device | — | 1999-07-27 |
| 5431769 | Method and system for plasma treatment | Akira Kojima, Takayuki Fukunaga, Yoshinori Hata, Yasushi Kato, Isao Honbori +2 more | 1995-07-11 |
| 4947088 | Method and apparatus for controlling reel tension | Tsuguo Gotoh, Kazunori Ohuchi | 1990-08-07 |
| 4720661 | Method and apparatus for controlling reel tension | Tsuguo Gotoh, Kazunori Ohuchi, Hirosuke Ohho | 1988-01-19 |