Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11480352 | Device for measuring clogging of filter in air conditioner and air conditioner | Toshiro Kisakibaru, Akira Yamazaki | 2022-10-25 |
| 6777355 | Manufacturing apparatus and manufacturing method for semiconductor device | Toshiro Kisakibaru, Yasushi Kato, Toshikazu Suzuki, Hirohisa Koriyama, Hayato Iwamoto +1 more | 2004-08-17 |
| 6670290 | Manufacturing apparatus and manufacturing method for semiconductor device | Toshiro Kisakibaru, Yasushi Kato, Toshikazu Suzuki, Hirohisa Koriyama, Hayato Iwamoto +1 more | 2003-12-30 |
| 6255220 | Method and apparatus for plasma control | Toshiro Kisakibaru, Akira Kojima, Yasushi Kato, Satoshi Bannai, Tomohiro Chiba +1 more | 2001-07-03 |
| 5945008 | Method and apparatus for plasma control | Toshiro Kisakibaru, Akira Kojima, Yasushi Kato, Satoshi Bannai, Tomohiro Chiba +1 more | 1999-08-31 |
| 5431769 | Method and system for plasma treatment | Toshiro Kisakibaru, Akira Kojima, Takayuki Fukunaga, Yoshinori Hata, Yasushi Kato +2 more | 1995-07-11 |