Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8196594 | Apparatus for removing foreign material from substrate and method for removing foreign material from substrate | Yoshiaki Tatsumi, Kinya Miyashita, Hiroshi Fujisawa | 2012-06-12 |
| 8158238 | Electrostatic chuck and electrode sheet for electrostatic chuck | Kinya Miyashita, Hiroshi Fujisawa | 2012-04-17 |
| 6725565 | Method for vacuum drying of substrate | Toru Watari | 2004-04-27 |
| 6676766 | Method for cleaning a substrate using a sherbet-like composition | Masami Furusawa, Satoshi Joya | 2004-01-13 |
| 6220935 | Apparatus and method for cleaning substrate | Masami Furusawa | 2001-04-24 |