Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7232760 | Method for producing semiconductor device, polishing apparatus, and polishing method | Takeshi Nogami, Shuzo Sato | 2007-06-19 |
| 7186322 | Methods of producing and polishing semiconductor device and polishing apparatus | Shuzo Sato, Yuji Segawa, Hiizu Ootorii, Zenya Yasuda, Masao Ishihara +2 more | 2007-03-06 |
| 6855634 | Polishing method and polishing apparatus | Shuzo Sato, Yuji Segawa, Takeshi Nogami | 2005-02-15 |
| 6808617 | Electrolytic polishing method | Shuzo Sato, Yuji Segawa, Takeshi Nogami | 2004-10-26 |
| 6797623 | Methods of producing and polishing semiconductor device and polishing apparatus | Shuzo Sato, Yuji Segawa, Hiizu Ootorii, Zenya Yasuda, Masao Ishihara +2 more | 2004-09-28 |
| 6693036 | Method for producing semiconductor device polishing apparatus, and polishing method | Takeshi Nogami, Shuzo Sato | 2004-02-17 |
| 6638564 | Method of electroless plating and electroless plating apparatus | Yuji Segawa, Masatoshi Suzuki, Katsumi Watanabe, Shuzo Sato | 2003-10-28 |
| 6555158 | Method and apparatus for plating, and plating structure | Yuji Segawa | 2003-04-29 |
| 6534117 | Electroless plating method and electroless plating solution | Yuji Segawa, Naoki Komai | 2003-03-18 |
| 6380065 | Interconnection structure and fabrication process therefor | Naoki Komai, Shingo Kadomura, Mitsuru Taguchi, Takaaki Miyamoto | 2002-04-30 |
| 5778911 | Liquid supplying apparatus | — | 1998-07-14 |
| 5591264 | Spin coating device | Emi Sugimoto, Yoshinori Ito | 1997-01-07 |
| 4387356 | Circuit breaker | Kunio Takemura, Hideya Kondo | 1983-06-07 |
| 4188240 | Method for producing a metal layer by plating | — | 1980-02-12 |