Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5401358 | Dry etching method | — | 1995-03-28 |
| 5397431 | Dry etching method | — | 1995-03-14 |
| 5393374 | Method of ashing | Junichi Sato | 1995-02-28 |
| 5391244 | Dry etching method | — | 1995-02-21 |
| 5370769 | Dry etching method of GaAs | Junichi Sato | 1994-12-06 |
| 5366590 | Dry etching method | — | 1994-11-22 |
| 5360510 | Dry etching method | — | 1994-11-01 |
| 5354421 | Dry etching method | Tetsuya Tatsumi, Tetsuji Nagayama | 1994-10-11 |
| 5342481 | Dry etching method | — | 1994-08-30 |
| 5326431 | Dry etching method utilizing (SN).sub.x polymer mask | — | 1994-07-05 |
| 5320708 | Dry etching method | Masakazu Muroyama | 1994-06-14 |
| 5314576 | Dry etching method using (SN).sub.x protective layer | — | 1994-05-24 |
| 5312518 | Dry etching method | — | 1994-05-17 |
| 5310456 | Dry etching method | — | 1994-05-10 |
| 5281304 | Process for forming copper wiring | — | 1994-01-25 |
| 5268070 | Dry etching method | Tetsuji Nagayama | 1993-12-07 |
| 5266157 | Dry etching method | — | 1993-11-30 |
| 5230772 | Dry etching method | — | 1993-07-27 |
| 5227337 | Interconnection forming method | — | 1993-07-13 |
| 5227341 | Method of manufacturing a semiconductor device using an isopropyl alcohol ashing step | Yukihiro Kamide, Tetsuya Tatsumi | 1993-07-13 |
| 5221430 | Dry etching method | Yukihiro Kamide | 1993-06-22 |
| 5217570 | Dry etching method | — | 1993-06-08 |
| 5180464 | Dry etching method | Tetsuya Tatsumi | 1993-01-19 |
| 5118387 | Dry etching method | — | 1992-06-02 |
| 5078833 | Dry etching method | — | 1992-01-07 |