| 7204739 |
Cathode panel for a cold cathode field emission display and cold cathode field emission display, and method of producing cathode panel for a cold cathode field emission display |
Shinji Kubota, Hiroshi Sata, Kazuo Kikuchi |
2007-04-17 |
| 7135378 |
Process for fabricating a semiconductor device having a plurality of encrusted semiconductor chips |
Yuji Takaoka, Teruo Hirayama, Masaki Hatano |
2006-11-14 |
| 6917155 |
Cathode panel for a cold cathode field emission display and cold cathode field emission display, and method of producing cathode panel for a cold cathode field emission display |
Shinji Kubota, Hiroshi Sata, Kazuo Kikuchi |
2005-07-12 |
| 6350698 |
Dry etching apparatus and its manufacturing method |
— |
2002-02-26 |
| 5827436 |
Method for etching aluminum metal films |
Yuji Takaoka, Yasuaki Yamamichi |
1998-10-27 |
| 5741742 |
Formation of aluminum-alloy pattern |
— |
1998-04-21 |
| 5591302 |
Process for etching copper containing metallic film and for forming copper containing metallic wiring |
Keiji Shinohara, Junichi Sato, Toshiharu Yanagida |
1997-01-07 |
| 5569627 |
Process for etching copper containing metallic film and for forming copper containing metallic wiring |
Keiji Shinohara, Junichi Sato, Toshiharu Yanagida |
1996-10-29 |
| 5505322 |
Process for etching copper containing metallic film and forming copper containing metallic wiring |
Keiji Shinohara, Junichi Sato, Toshiharu Yanagida |
1996-04-09 |
| 5306379 |
Dry etching apparatus for rectangular substrate comprising plasma bar generation means |
— |
1994-04-26 |
| 5227341 |
Method of manufacturing a semiconductor device using an isopropyl alcohol ashing step |
Shingo Kadomura, Tetsuya Tatsumi |
1993-07-13 |
| 5221430 |
Dry etching method |
Shingo Kadomura |
1993-06-22 |