Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6355553 | Method of forming a metal plug in a contact hole | — | 2002-03-12 |
| 5914277 | Method for forming metallic wiring pattern | — | 1999-06-22 |
| 5591302 | Process for etching copper containing metallic film and for forming copper containing metallic wiring | Junichi Sato, Yukihiro Kamide, Toshiharu Yanagida | 1997-01-07 |
| 5569627 | Process for etching copper containing metallic film and for forming copper containing metallic wiring | Junichi Sato, Yukihiro Kamide, Toshiharu Yanagida | 1996-10-29 |
| 5505322 | Process for etching copper containing metallic film and forming copper containing metallic wiring | Junichi Sato, Yukihiro Kamide, Toshiharu Yanagida | 1996-04-09 |
| 5502334 | Metal wiring | — | 1996-03-26 |
| 5312515 | Dry etching method | — | 1994-05-17 |
| 5288952 | Multilayer connector | Junichi Sato | 1994-02-22 |
| 5207868 | Etching process for films of aluminum or its alloys | — | 1993-05-04 |
| 5200032 | Dry etching method | — | 1993-04-06 |
| 5194118 | Dry etching method | — | 1993-03-16 |