Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6057243 | Method for producing semiconductor device | — | 2000-05-02 |
| 5997757 | Method of forming connection hole | Masaki Minami | 1999-12-07 |
| 5831321 | Semiconductor device in which an anti-reflective layer is formed by varying the composition thereof | — | 1998-11-03 |
| 5674356 | Method for forming a semiconductor device in which an anti reflective layer is formed by varying the composition thereof | — | 1997-10-07 |
| 5632910 | Multilayer resist pattern forming method | Tetsuo Gocho | 1997-05-27 |
| 5419809 | Dry etching method | Toshiharu Yanagida | 1995-05-30 |
| 5378311 | Method of producing semiconductor device | Tetsuya Tatsumi | 1995-01-03 |
| 5368686 | Dry etching method for W polycide using sulfur deposition | Tetsuya Tatsumi | 1994-11-29 |
| 5369061 | Method of producing semiconductor device using a hydrogen-enriched layer | — | 1994-11-29 |
| 5354421 | Dry etching method | Tetsuya Tatsumi, Shingo Kadomura | 1994-10-11 |
| 5268070 | Dry etching method | Shingo Kadomura | 1993-12-07 |