Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12074030 | Etching method of oxide semiconductor film, oxide semiconductor workpiece, and electronic device | AKIKO HIRATA | 2024-08-27 |
| 12062548 | Etching method for oxide semiconductor film | AKIKO HIRATA, Tetsuya Tatsumi, Satoshi Hamaguchi, Kazuhiro Karahashi | 2024-08-13 |
| 11798965 | Solid-state imaging device and method for manufacturing the same | — | 2023-10-24 |
| 11017987 | Etching method and etching processing apparatus | — | 2021-05-25 |
| 10804313 | Semiconductor device and solid-state imaging device | Yoshihisa Kagawa, Nobutoshi Fujii, Tokihisa KANEGUCHI, Yoshiya Hagimoto, Kenichi Aoyagi +1 more | 2020-10-13 |
| 10504839 | Semiconductor device and manufacturing method of the same | — | 2019-12-10 |
| 10157837 | Semiconductor device and manufacturing method of the same | — | 2018-12-18 |
| 10026769 | Semiconductor device and solid-state imaging device | Yoshihisa Kagawa, Nobutoshi Fujii, Tokihisa KANEGUCHI, Yoshiya Hagimoto, Kenichi Aoyagi +1 more | 2018-07-17 |
| 9859214 | Semiconductor device and manufacturing method of the same | — | 2018-01-02 |
| 9627359 | Semiconductor device and manufacturing method of the same | — | 2017-04-18 |
| 9425142 | Semiconductor device and manufacturing method of the same | — | 2016-08-23 |
| 9293411 | Semiconductor device and manufacturing method of the same | — | 2016-03-22 |
| 9287097 | Predicting ultraviolet ray damage with visible wavelength spectroscopy during a semiconductor manufacturing process | Nobuyuki Kuboi, Tetsuya Tatsumi | 2016-03-15 |
| 8871633 | Semiconductor device and manufacturing method of the same | — | 2014-10-28 |
| 8586468 | Integrated circuit chip stack employing carbon nanotube interconnects | Takeshi Nogami | 2013-11-19 |
| 7300868 | Damascene interconnection having porous low k layer with a hard mask reduced in thickness | Takeshi Nogami | 2007-11-27 |
| 6943104 | Method of etching insulating film and method of forming interconnection layer | Shingo Kadomura | 2005-09-13 |
| 6638848 | Method of etching insulating film and method of forming interconnection layer | Shingo Kadomura | 2003-10-28 |
| 6407011 | Low dielectric constant insulating films with laminated carbon-containing silicon oxide and organic layers | Koichi Ikeda, Hideyuki Kito, Toshiaki Hasegawa | 2002-06-18 |