Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392427 | Insulated fluid lines in chemical mechanical polishing | Chad Pollard, Hari Soundararajan, Paul D. Butterfield, Shou-Sung Chang, Haosheng Wu +1 more | 2025-08-19 |
| 11721563 | Non-contact clean module | Jagan Rangarajan, Adrian Blank, Edward Golubovsky, Steven M. Zuniga, Ekaterina A. Mikhaylichenko +2 more | 2023-08-08 |
| 11705354 | Substrate handling systems | Gee Sun Hoey, Jagan Rangarajan | 2023-07-18 |
| 11289347 | Non-contact clean module | Jagan Rangarajan, Adrian Blank, Edward Golubovsky, Steven M. Zuniga, Ekaterina A. Mikhaylichenko +2 more | 2022-03-29 |
| 10399205 | Systems, apparatus, and methods for chemical polishing | Rajeev Bajaj | 2019-09-03 |