Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392427 | Insulated fluid lines in chemical mechanical polishing | Hari Soundararajan, Paul D. Butterfield, Shou-Sung Chang, Haosheng Wu, Calvin Spencer Lee +1 more | 2025-08-19 |
| 12290897 | Fluid-tight electrical connection techniques for semiconductor processing | Shou-Sung Chang, Haosheng Wu | 2025-05-06 |
| 12106976 | Steam-assisted single substrate cleaning process and apparatus | Jianshe Tang, Wei Lu, Haosheng Wu, Taketo Sekine, Shou-Sung Chang +1 more | 2024-10-01 |
| 11833637 | Control of steam generation for chemical mechanical polishing | Hari Soundararajan, Shou-Sung Chang, Calvin Spencer Lee, Jonathan P. Domin, Shuchivrat Datar +3 more | 2023-12-05 |
| 11728185 | Steam-assisted single substrate cleaning process and apparatus | Jianshe Tang, Wei Lu, Haosheng Wu, Taketo Sekine, Shou-Sung Chang +1 more | 2023-08-15 |
| 11251047 | Clog detection in a multi-port fluid delivery system | Roy C. Nangoy, Allen L. D'Ambra | 2022-02-15 |