Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400881 | Apparatus and method of substrate edge cleaning and substrate carrier head gap cleaning | Jimin Zhang, Jianshe Tang, Brian J. Brown | 2025-08-26 |
| 12285838 | Wafer edge asymmetry correction using groove in polishing pad | Jimin Zhang, Jianshe Tang, Brian J. Brown, Priscilla Diep LaRosa | 2025-04-29 |
| 12106976 | Steam-assisted single substrate cleaning process and apparatus | Jianshe Tang, Haosheng Wu, Taketo Sekine, Shou-Sung Chang, Hari Soundararajan +1 more | 2024-10-01 |
| 11951589 | Wafer edge asymmetry correction using groove in polishing pad | Jimin Zhang, Jianshe Tang, Brian J. Brown, Priscilla Diep | 2024-04-09 |
| 11931854 | Chemical mechanical polishing using time share control | Jimin Zhang, Jianshe Tang, Brian J. Brown, Priscilla Diep LaRosa | 2024-03-19 |
| 11823916 | Apparatus and method of substrate edge cleaning and substrate carrier head gap cleaning | Jimin Zhang, Jianshe Tang, Brian J. Brown | 2023-11-21 |
| 11780045 | Compensation for substrate doping for in-situ electromagnetic inductive monitoring | David Maxwell Gage, Harry Q. Lee, Kun Xu, Jimin Zhang | 2023-10-10 |
| 11728185 | Steam-assisted single substrate cleaning process and apparatus | Jianshe Tang, Haosheng Wu, Taketo Sekine, Shou-Sung Chang, Hari Soundararajan +1 more | 2023-08-15 |
| 11298794 | Chemical mechanical polishing using time share control | Jimin Zhang, Jianshe Tang, Brian J. Brown, Priscilla Diep | 2022-04-12 |
| 8387042 | Remote servlets collaboration | Hong Cai, Li Tang, Bo Yang | 2013-02-26 |
| 8066552 | Multi-layer polishing pad for low-pressure polishing | Alain Duboust, Shou-Sung Chang, Siew Neo, Yan Wang, Antoine P. Manens +1 more | 2011-11-29 |
| 7682457 | Frontside structure damage protected megasonics clean | Zhiyong Li, Jianshe Tang, Bo Xie | 2010-03-23 |
| 7543289 | Method for accessing and collaborating between servlets located on different Java virtual machines | Hong Cai, Bo Yang, Li Tang | 2009-06-02 |