| 12400881 |
Apparatus and method of substrate edge cleaning and substrate carrier head gap cleaning |
Jimin Zhang, Jianshe Tang, Brian J. Brown |
2025-08-26 |
| 12285838 |
Wafer edge asymmetry correction using groove in polishing pad |
Jimin Zhang, Jianshe Tang, Brian J. Brown, Priscilla Diep LaRosa |
2025-04-29 |
| 12106976 |
Steam-assisted single substrate cleaning process and apparatus |
Jianshe Tang, Haosheng Wu, Taketo Sekine, Shou-Sung Chang, Hari Soundararajan +1 more |
2024-10-01 |
| 11951589 |
Wafer edge asymmetry correction using groove in polishing pad |
Jimin Zhang, Jianshe Tang, Brian J. Brown, Priscilla Diep |
2024-04-09 |
| 11931854 |
Chemical mechanical polishing using time share control |
Jimin Zhang, Jianshe Tang, Brian J. Brown, Priscilla Diep LaRosa |
2024-03-19 |
| 11823916 |
Apparatus and method of substrate edge cleaning and substrate carrier head gap cleaning |
Jimin Zhang, Jianshe Tang, Brian J. Brown |
2023-11-21 |
| 11780045 |
Compensation for substrate doping for in-situ electromagnetic inductive monitoring |
David Maxwell Gage, Harry Q. Lee, Kun Xu, Jimin Zhang |
2023-10-10 |
| 11728185 |
Steam-assisted single substrate cleaning process and apparatus |
Jianshe Tang, Haosheng Wu, Taketo Sekine, Shou-Sung Chang, Hari Soundararajan +1 more |
2023-08-15 |
| 11298794 |
Chemical mechanical polishing using time share control |
Jimin Zhang, Jianshe Tang, Brian J. Brown, Priscilla Diep |
2022-04-12 |
| 8387042 |
Remote servlets collaboration |
Hong Cai, Li Tang, Bo Yang |
2013-02-26 |
| 8066552 |
Multi-layer polishing pad for low-pressure polishing |
Alain Duboust, Shou-Sung Chang, Siew Neo, Yan Wang, Antoine P. Manens +1 more |
2011-11-29 |
| 7682457 |
Frontside structure damage protected megasonics clean |
Zhiyong Li, Jianshe Tang, Bo Xie |
2010-03-23 |
| 7543289 |
Method for accessing and collaborating between servlets located on different Java virtual machines |
Hong Cai, Bo Yang, Li Tang |
2009-06-02 |
