Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus and method of substrate edge cleaning and substrate carrier head gap cleaning

Apparatus and method of substrate edge cleaning and substrate carrier head gap cleaning

US Patent 11823916 · Granted Nov 21, 2023

Estimated economic value: $39,416,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for CMP temperature control2025
Apparatus and method of substrate edge cleaning and substrate carrier head gap c2025
Apparatus and method of substrate edge cleaning and substrate carrier head gap c2025
Apparatus and method of substrate edge cleaning and substrate carrier head gap c2025
Apparatus and method of substrate edge cleaning and substrate carrier head gap c2025
Control of processing parameters for substrate polishing with substrate precessi2025
CD20 therapies, CD22 therapies, and combination therapies with a CD19 chimeric a2025
Apparatus and method for CMP temperature control2025
Apparatus and method for CMP temperature control2025
Apparatus and method for CMP temperature control2025
Apparatus and method for CMP temperature control2025
Wafer edge asymmetry correction using groove in polishing pad2025