| 12240078 |
Cleaning system for polishing liquid delivery arm |
Shantanu Rajiv Gadgil, Nathan Davis, Allen L. D'Ambra, Michael J. Coughlin, Sumit Subhash Patankar |
2025-03-04 |
| 11251047 |
Clog detection in a multi-port fluid delivery system |
Chad Pollard, Allen L. D'Ambra |
2022-02-15 |
| 9681497 |
Multi zone heating and cooling ESC for plasma process chamber |
Dmitry Lubomirsky |
2017-06-13 |
| 9488315 |
Gas distribution apparatus for directional and proportional delivery of process gas to a process chamber |
Saravjeet Singh |
2016-11-08 |
| 9305810 |
Method and apparatus for fast gas exchange, fast gas switching, and programmable gas delivery |
Saravjeet Singh |
2016-04-05 |
| 9196498 |
Stationary actively-cooled shadow ring for heat dissipation in plasma chamber |
— |
2015-11-24 |
| 9162236 |
Proportional and uniform controlled gas flow delivery for dry plasma etch apparatus |
Andrew Nguyen |
2015-10-20 |
| 9117868 |
Bipolar electrostatic chuck for dicing tape thermal management during plasma dicing |
— |
2015-08-25 |
| 9070633 |
Method and apparatus for high efficiency gas dissociation in inductive coupled plasma reactor |
Saravjeet Singh, Jon C. Farr, Sharma Pamarthy, Ajay Kumar |
2015-06-30 |
| 9034771 |
Cooling pedestal for dicing tape thermal management during plasma dicing |
— |
2015-05-19 |
| 8920599 |
High efficiency gas dissociation in inductively coupled plasma reactor with improved uniformity |
Jivko Dinev, Saravjeet Singh |
2014-12-30 |
| 8753474 |
Method and apparatus for high efficiency gas dissociation in inductive couple plasma reactor |
Saravjeet Singh, Jon C. Farr, Sharma Pamarthy, Ajay Kumar |
2014-06-17 |
| 8096852 |
In-situ performance prediction of pad conditioning disk by closed loop torque monitoring |
Sameer Deshpande, Shou-Sung Chang, Hung Chih Chen, Stan Tsai |
2012-01-17 |
| 7963826 |
Apparatus and methods for conditioning a polishing pad |
Shou-Sung Chang, Donald Olgado, Hung Chih Chen, Gerald Alonzo |
2011-06-21 |
| 7433759 |
Apparatus and methods for positioning wafers |
— |
2008-10-07 |
| 7155319 |
Closed loop control on liquid delivery system ECP slim cell |
Allen L. D'Ambra, Yevgeniy Rabinovich, David Z. Chen, Tao Li |
2006-12-26 |
