Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12240078 | Cleaning system for polishing liquid delivery arm | Shantanu Rajiv Gadgil, Nathan Davis, Allen L. D'Ambra, Michael J. Coughlin, Sumit Subhash Patankar | 2025-03-04 |
| 11251047 | Clog detection in a multi-port fluid delivery system | Chad Pollard, Allen L. D'Ambra | 2022-02-15 |
| 9681497 | Multi zone heating and cooling ESC for plasma process chamber | Dmitry Lubomirsky | 2017-06-13 |
| 9488315 | Gas distribution apparatus for directional and proportional delivery of process gas to a process chamber | Saravjeet Singh | 2016-11-08 |
| 9305810 | Method and apparatus for fast gas exchange, fast gas switching, and programmable gas delivery | Saravjeet Singh | 2016-04-05 |
| 9196498 | Stationary actively-cooled shadow ring for heat dissipation in plasma chamber | — | 2015-11-24 |
| 9162236 | Proportional and uniform controlled gas flow delivery for dry plasma etch apparatus | Andrew Nguyen | 2015-10-20 |
| 9117868 | Bipolar electrostatic chuck for dicing tape thermal management during plasma dicing | — | 2015-08-25 |
| 9070633 | Method and apparatus for high efficiency gas dissociation in inductive coupled plasma reactor | Saravjeet Singh, Jon C. Farr, Sharma Pamarthy, Ajay Kumar | 2015-06-30 |
| 9034771 | Cooling pedestal for dicing tape thermal management during plasma dicing | — | 2015-05-19 |
| 8920599 | High efficiency gas dissociation in inductively coupled plasma reactor with improved uniformity | Jivko Dinev, Saravjeet Singh | 2014-12-30 |
| 8753474 | Method and apparatus for high efficiency gas dissociation in inductive couple plasma reactor | Saravjeet Singh, Jon C. Farr, Sharma Pamarthy, Ajay Kumar | 2014-06-17 |
| 8096852 | In-situ performance prediction of pad conditioning disk by closed loop torque monitoring | Sameer Deshpande, Shou-Sung Chang, Hung Chih Chen, Stan Tsai | 2012-01-17 |
| 7963826 | Apparatus and methods for conditioning a polishing pad | Shou-Sung Chang, Donald Olgado, Hung Chih Chen, Gerald Alonzo | 2011-06-21 |
| 7433759 | Apparatus and methods for positioning wafers | — | 2008-10-07 |
| 7155319 | Closed loop control on liquid delivery system ECP slim cell | Allen L. D'Ambra, Yevgeniy Rabinovich, David Z. Chen, Tao Li | 2006-12-26 |