| 12240078 |
Cleaning system for polishing liquid delivery arm |
Roy C. Nangoy, Shantanu Rajiv Gadgil, Nathan Davis, Allen L. D'Ambra, Michael J. Coughlin |
2025-03-04 |
| 12134167 |
Pad conditioner cleaning system |
Shantanu Rajiv Gadgil, Nathan Davis, Michael J. Coughlin, Allen L. D'Ambra |
2024-11-05 |
| 12125728 |
Substrate carrier |
Fred Eric Ruhland, Vijay D. Parkhe, Daniel Lee Diehl, Mingwei Zhu, Hiroyuki Takahama +1 more |
2024-10-22 |
| 11986925 |
Maintenance methods for polishing systems and articles related thereto |
Shantanu Rajiv Gadgil, Nathan Davis, Michael J. Coughlin, Allen L. D'Ambra |
2024-05-21 |
| 11756804 |
Platen shield cleaning system |
Shantanu Rajiv Gadgil, Nathan Davis, Allen L. D'Ambra |
2023-09-12 |
| 11710630 |
Plasma block with integrated cooling |
Tanmay Pramod GURJAR, Sudhir Gondhalekar |
2023-07-25 |
| 11648645 |
Pad conditioner cleaning system |
Shantanu Rajiv Gadgil, Nathan Davis, Michael J. Coughlin, Allen L. D'Ambra |
2023-05-16 |
| 11610792 |
Heated substrate support with thermal baffles |
Fred Eric Ruhland |
2023-03-21 |
| 11545371 |
Platen shield cleaning system |
Shantanu Rajiv Gadgil, Nathan Davis, Allen L. D'Ambra |
2023-01-03 |
| 11484987 |
Maintenance methods for polishing systems and articles related thereto |
Shantanu Rajiv Gadgil, Nathan Davis, Michael J. Coughlin, Allen L. D'Ambra |
2022-11-01 |
| 11370083 |
Pad conditioner cleaning system |
Shantanu Rajiv Gadgil, Nathan Davis, Michael J. Coughlin, Allen L. D'Ambra |
2022-06-28 |
| D904640 |
Substrate carrier |
Fred Eric Ruhland, Vijay D. Parkhe, Daniel Lee Diehl, Mingwei Zhu, Hiroyuki Takahama +1 more |
2020-12-08 |
