Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125728 | Substrate carrier | Fred Eric Ruhland, Sumit Subhash Patankar, Vijay D. Parkhe, Mingwei Zhu, Hiroyuki Takahama +1 more | 2024-10-22 |
| 11994800 | Dose reduction of patterned metal oxide photoresists | Tejinder Singh, Lifan Yan, Abhijit Basu Mallick, Ho-yung David Hwang, Jothilingam Ramalingam | 2024-05-28 |
| 11802349 | Method for depositing high quality PVD films | Zihao Yang, Mingwei Zhu, Nag B. Patibandla, Yong Cao, Shumao ZHANG +3 more | 2023-10-31 |
| 11778926 | Method and apparatus for deposition of multilayer device with superconductive film | Mingwei Zhu, Zihao Yang, Nag B. Patibandla, Ludovic Godet, Yong Cao +1 more | 2023-10-03 |
| 11739418 | Method and apparatus for deposition of metal nitrides | Mingwei Zhu, Zihao Yang, Nag B. Patibandla, Ludovic Godet, Yong Cao +1 more | 2023-08-29 |
| 11575071 | Oxygen controlled PVD ALN buffer for GAN-based optoelectronic and electronic devices | Mingwei Zhu, Nag B. Patibandla, Rongjun Wang, Vivek Agrawal, Anantha K. Subramani | 2023-02-07 |
| 11550222 | Dose reduction of patterned metal oxide photoresists | Tejinder Singh, Lifan Yan, Abhijit Basu Mallick, Ho-yung David Hwang, Jothilingam Ramalingam | 2023-01-10 |
| 11495461 | Film stack for lithography applications | Tejinder Singh, Suketu Arun Parikh, Michael Stolfi, Jothilingam Ramalingam, Yong Cao +3 more | 2022-11-08 |
| 11437559 | Method and apparatus for deposition of multilayer device with superconductive film | Mingwei Zhu, Zihao Yang, Nag B. Patibandla, Ludovic Godet, Yong Cao +1 more | 2022-09-06 |
| 11313034 | Methods for depositing amorphous silicon layers or silicon oxycarbide layers via physical vapor deposition | Weimin Zeng, Yong Cao, Huixiong Dai, Khoi A. Phan, Christopher S. Ngai +2 more | 2022-04-26 |
| 11081623 | Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices | Mingwei Zhu, Nag B. Patibandla, Rongjun Wang, Vivek Agrawal, Anantha K. Subramani | 2021-08-03 |
| 11056277 | Magnetized substrate carrier apparatus with shadow mask for deposition | Alexander Lerner, Roey Shaviv | 2021-07-06 |
| 10886155 | Optical stack deposition and on-board metrology | Mingwei Zhu, Zihao Yang, Nag B. Patibandla, Yong Cao, Weimin Zeng +5 more | 2021-01-05 |
| D904640 | Substrate carrier | Fred Eric Ruhland, Sumit Subhash Patankar, Vijay D. Parkhe, Mingwei Zhu, Hiroyuki Takahama +1 more | 2020-12-08 |
| 10546973 | Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices | Mingwei Zhu, Nag B. Patibandla, Rongjun Wang, Vivek Agrawal, Anantha K. Subramani | 2020-01-28 |
| 10236412 | Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices | Mingwei Zhu, Nag B. Patibandla, Rongjun Wang, Vivek Agrawal, Anantha K. Subramani | 2019-03-19 |
| 10193014 | Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices | Mingwei Zhu, Nag B. Patibandla, Rongjun Wang, Vivek Agrawal, Anantha K. Subramani | 2019-01-29 |
| 10109481 | Aluminum-nitride buffer and active layers by physical vapor deposition | Mingwei Zhu, Nag B. Patibandla, Rongjun Wang, Vivek Agrawal, Anantha K. Subramani +1 more | 2018-10-23 |
| 10096725 | Method for graded anti-reflective coatings by physical vapor deposition | Yong Cao, Rongjun Wang, Xianmin Tang, TAI-CHOU PAPO CHEN, Tingjun Xu | 2018-10-09 |
| 9929310 | Oxygen controlled PVD aluminum nitride buffer for gallium nitride-based optoelectronic and electronic devices | Mingwei Zhu, Nag B. Patibandia, Rongjun Wang, Vivek Agrawal, Anantha K. Subramani | 2018-03-27 |
| 9746678 | Light wave separation lattices and methods of forming light wave separation lattices | Yong Cao, Mingwei Zhu, TAI-CHOU PAPO CHEN | 2017-08-29 |
| 9633839 | Methods for depositing dielectric films via physical vapor deposition processes | Weimin Zeng, Thanh X. Nguyen, Yana Cheng, Yong Cao, Srinivas Guggilla +2 more | 2017-04-25 |
| 9478421 | Optically tuned hardmask for multi-patterning applications | Christopher Dennis Bencher, Huixiong Dai, Yong Cao, Tingjun Xu, Weimin Zeng +1 more | 2016-10-25 |
| 9478697 | Reusable substrate carrier | Sriskantharajah Thirunavukarasu, Mingwei Zhu, Karthik Elumalai, Thean Ming Tan, Yong Cao +1 more | 2016-10-25 |
| 9337051 | Method for critical dimension reduction using conformal carbon films | Bencherki Mebarki, Bok Hoen Kim, Deenesh Padhi, Li Yan Miao, Pramit Manna +4 more | 2016-05-10 |