Issued Patents All Time
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9177796 | Optically tuned hardmask for multi-patterning applications | Christopher Dennis Bencher, Huixiong Dai, Yong Cao, Tingjun Xu, Weimin Zeng +1 more | 2015-11-03 |
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9177796 | Optically tuned hardmask for multi-patterning applications | Christopher Dennis Bencher, Huixiong Dai, Yong Cao, Tingjun Xu, Weimin Zeng +1 more | 2015-11-03 |