Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11994800 | Dose reduction of patterned metal oxide photoresists | Tejinder Singh, Abhijit Basu Mallick, Daniel Lee Diehl, Ho-yung David Hwang, Jothilingam Ramalingam | 2024-05-28 |
| 11550222 | Dose reduction of patterned metal oxide photoresists | Tejinder Singh, Abhijit Basu Mallick, Daniel Lee Diehl, Ho-yung David Hwang, Jothilingam Ramalingam | 2023-01-10 |
| 11495461 | Film stack for lithography applications | Tejinder Singh, Suketu Arun Parikh, Daniel Lee Diehl, Michael Stolfi, Jothilingam Ramalingam +3 more | 2022-11-08 |