Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368033 | Methods and apparatus for physical vapor deposition (PVD) dielectric deposition | William Fruchterman | 2025-07-22 |
| 12176205 | Method and chamber for backside physical vapor deposition | Chunming Zhou, Yong Cao, Kevin Moraes, Shane Lavan | 2024-12-24 |
| 12142478 | Method and chamber for backside physical vapor deposition | Chunming Zhou, Yong Cao, Kevin Moraes, Shane Lavan | 2024-11-12 |
| 12027354 | Cleaning of SIN with CCP plasma or RPS clean | Yong Cao, Ilya Lavitsky, Keith A. Miller, Tza-Jing Gung, Xianmin Tang +4 more | 2024-07-02 |
| 11994800 | Dose reduction of patterned metal oxide photoresists | Tejinder Singh, Lifan Yan, Abhijit Basu Mallick, Daniel Lee Diehl, Ho-yung David Hwang | 2024-05-28 |
| 11915918 | Cleaning of sin with CCP plasma or RPS clean | Yong Cao, Ilya Lavitsky, Keith A. Miller, Tza-Jing Gung, Xianmin Tang +4 more | 2024-02-27 |
| 11842890 | Methods and apparatus for physical vapor deposition (PVD) dielectric deposition | William Fruchterman | 2023-12-12 |
| 11661651 | Methods and apparatus for passivating a target | Chao Du, Xing CHEN, Keith A. Miller, Jianxin Lei | 2023-05-30 |
| 11655534 | Apparatus for reducing tungsten resistivity | Wenting Hou, Jianxin Lei, Prashanth Kothnur, William Johanson | 2023-05-23 |
| 11572618 | Method and chamber for backside physical vapor deposition | Xiaozhou Che, Yong Cao, Shane Lavan, Chunming Zhou | 2023-02-07 |
| 11550222 | Dose reduction of patterned metal oxide photoresists | Tejinder Singh, Lifan Yan, Abhijit Basu Mallick, Daniel Lee Diehl, Ho-yung David Hwang | 2023-01-10 |
| 11512387 | Methods and apparatus for passivating a target | Chao Du, Xing CHEN, Keith A. Miller, Jianxin Lei | 2022-11-29 |
| 11495461 | Film stack for lithography applications | Tejinder Singh, Suketu Arun Parikh, Daniel Lee Diehl, Michael Stolfi, Yong Cao +3 more | 2022-11-08 |
| 11469096 | Method and chamber for backside physical vapor deposition | Chunming Zhou, Yong Cao, Kevin Moraes, Shane Lavan | 2022-10-11 |
| 11450514 | Methods of reducing particles in a physical vapor deposition (PVD) chamber | Wei Dou, Yong Cao, Mingdong Li, Shane Lavan, Chengyu Liu | 2022-09-20 |
| 11447857 | Methods and apparatus for reducing tungsten resistivity | Wenting Hou, Jianxin Lei, Prashanth Kothnur, William Johanson | 2022-09-20 |
| 11270898 | Apparatus for enhancing flow uniformity in a process chamber | Kirankumar Neelasandra SAVANDAIAH, Fuhong Zhang, William Johanson | 2022-03-08 |
| 10734235 | Systems and methods for low resistivity physical vapor deposition of a tungsten film | Thanh X. Nguyen, Zhiyong Wang, Jianxin Lei, Xianmin Tang | 2020-08-04 |
| 10388532 | Methods and devices using PVD ruthenium | Ross Marshall, Jianxin Lei, Xianmin Tang | 2019-08-20 |
| 10043670 | Systems and methods for low resistivity physical vapor deposition of a tungsten film | Thanh X. Nguyen, Zhiyong Wang, Jianxin Lei, Xianmin Tang | 2018-08-07 |
| 9461137 | Tungsten silicide nitride films and methods of formation | Rajkumar Jakkaraju, Jianxin Lei, Zhiyong Wang | 2016-10-04 |