Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12191198 | Low resistivity tungsten film and method of manufacture | Feihu Wang, Joung Joo Lee, Xi Cen, Zhibo Yuan, Wei-Sheng Lei +2 more | 2025-01-07 |
| 12176205 | Method and chamber for backside physical vapor deposition | Jothilingam Ramalingam, Yong Cao, Kevin Moraes, Shane Lavan | 2024-12-24 |
| 12142478 | Method and chamber for backside physical vapor deposition | Jothilingam Ramalingam, Yong Cao, Kevin Moraes, Shane Lavan | 2024-11-12 |
| 12094773 | Methods for low resistivity and stress tungsten gap fill | Xi Cen, Kai Wu, Min Heon, Wei Min Chan, Tom Ho Wing Yu +4 more | 2024-09-17 |
| 11798845 | Methods and apparatus for low resistivity and stress tungsten gap fill | Xi Cen, Kai Wu, Min Heon, Wei Min Chan, Tom Ho Wing Yu +4 more | 2023-10-24 |
| 11572618 | Method and chamber for backside physical vapor deposition | Jothilingam Ramalingam, Xiaozhou Che, Yong Cao, Shane Lavan | 2023-02-07 |
| 11469096 | Method and chamber for backside physical vapor deposition | Jothilingam Ramalingam, Yong Cao, Kevin Moraes, Shane Lavan | 2022-10-11 |
| 8431033 | High density plasma etchback process for advanced metallization applications | Liqi Wu, Karthik S. Colinjivadi, Emery Kuo, Huatan Qiu, KieJin Park | 2013-04-30 |