EK

Emery Kuo

NS Novellus Systems: 1 patents #479 of 780Top 65%
📍 Sunnyvale, CA: #10,174 of 14,302 inventorsTop 75%
🗺 California: #247,236 of 386,348 inventorsTop 65%
Overall (All Time): #3,157,359 of 4,157,543Top 80%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8431033 High density plasma etchback process for advanced metallization applications Chunming Zhou, Liqi Wu, Karthik S. Colinjivadi, Huatan Qiu, KieJin Park 2013-04-30