Issued Patents All Time
Showing 25 most recent of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387978 | Ru liner above a barrier layer | Zhaoxuan Wang, Wenting Hou, Sung-Kwan Kang, Anand Iyer | 2025-08-12 |
| 12338527 | Shutter disk for physical vapor deposition (PVD) chamber | Zhiyong Wang, Halbert Chong, Irena H. Wysok, Rongjun Wang, Lei Zhou +2 more | 2025-06-24 |
| 11908696 | Methods and devices for subtractive self-alignment | He Ren, Hao Jiang, Mehul Naik, Wenting Hou, Chen Gong +1 more | 2024-02-20 |
| 11898236 | Methods and apparatus for processing a substrate | Zhiyong Wang, Halbert Chong, John C. Forster, Irena H. Wysok, Tiefeng Shi +9 more | 2024-02-13 |
| 11661651 | Methods and apparatus for passivating a target | Chao Du, Xing CHEN, Keith A. Miller, Jothilingam Ramalingam | 2023-05-30 |
| 11655534 | Apparatus for reducing tungsten resistivity | Wenting Hou, Jothilingam Ramalingam, Prashanth Kothnur, William Johanson | 2023-05-23 |
| 11637107 | Silicon-containing layer for bit line resistance reduction | Tom Ho Wing Yu, Nobuyuki Sasaki, Wenting Hou, Rongjun Wang, Tza-Jing Gung | 2023-04-25 |
| 11626410 | Silicon-containing layer for bit line resistance reduction | Tom Ho Wing Yu, Nobuyuki Sasaki, Wenting Hou, Rongjun Wang, Tza-Jing Gung | 2023-04-11 |
| 11512387 | Methods and apparatus for passivating a target | Chao Du, Xing CHEN, Keith A. Miller, Jothilingam Ramalingam | 2022-11-29 |
| 11489110 | Methods for treating magnesium oxide film | Xiaodong Wang, Renu Whig, Rongjun Wang | 2022-11-01 |
| 11447857 | Methods and apparatus for reducing tungsten resistivity | Wenting Hou, Jothilingam Ramalingam, Prashanth Kothnur, William Johanson | 2022-09-20 |
| 11257677 | Methods and devices for subtractive self-alignment | He Ren, Hao Jiang, Mehul Naik, Wenting Hou, Chen Gong +1 more | 2022-02-22 |
| 11227751 | Plasma chamber target for reducing defects in workpiece during dielectric sputtering | Xiaodong Wang, Rongjun Wang | 2022-01-18 |
| 11114320 | Processing system and method of forming a contact | Gaurav Thareja, Takashi Kuratomi, Avgerinos V. Gelatos, Xianmin Tang, Sanjay Natarajan +3 more | 2021-09-07 |
| 10950500 | Methods and apparatus for filling a feature disposed in a substrate | Roey Shaviv, Xikun Wang, Ismail Emesh, Wenting Hou | 2021-03-16 |
| 10903112 | Methods and apparatus for smoothing dynamic random access memory bit line metal | Priyadarshi Panda, Sanjay Natarajan, In-Seok Hwang, Nobuyuki Sasaki | 2021-01-26 |
| 10770346 | Selective cobalt removal for bottom up gapfill | Xikun Wang, Nitin K. Ingle, Roey Shaviv | 2020-09-08 |
| 10734235 | Systems and methods for low resistivity physical vapor deposition of a tungsten film | Jothilingam Ramalingam, Thanh X. Nguyen, Zhiyong Wang, Xianmin Tang | 2020-08-04 |
| 10700072 | Cap layer for bit line resistance reduction | Priyadarshi Panda, Wenting Hou, Mihaela Balseanu, Ning Li, Sanjay Natarajan +4 more | 2020-06-30 |
| 10388532 | Methods and devices using PVD ruthenium | Jothilingam Ramalingam, Ross Marshall, Xianmin Tang | 2019-08-20 |
| 10304732 | Methods and apparatus for filling substrate features with cobalt | Wenting Hou, Joung Joo Lee, Rong Tao | 2019-05-28 |
| 10163696 | Selective cobalt removal for bottom up gapfill | Xikun Wang, Nitin K. Ingle, Roey Shaviv | 2018-12-25 |
| 10043670 | Systems and methods for low resistivity physical vapor deposition of a tungsten film | Jothilingam Ramalingam, Thanh X. Nguyen, Zhiyong Wang, Xianmin Tang | 2018-08-07 |
| 9583349 | Lowering tungsten resistivity by replacing titanium nitride with titanium silicon nitride | Srinivas Gandikota, Zhendong Liu, Rajkumar Jakkaraju | 2017-02-28 |
| 9461137 | Tungsten silicide nitride films and methods of formation | Jothilingam Ramalingam, Rajkumar Jakkaraju, Zhiyong Wang | 2016-10-04 |