Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12338527 | Shutter disk for physical vapor deposition (PVD) chamber | Zhiyong Wang, Halbert Chong, Jianxin Lei, Rongjun Wang, Lei Zhou +2 more | 2025-06-24 |
| 11898236 | Methods and apparatus for processing a substrate | Zhiyong Wang, Halbert Chong, John C. Forster, Tiefeng Shi, Gang Fu +9 more | 2024-02-13 |
| 11846013 | Methods and apparatus for extended chamber for through silicon via deposition | David Gunther, Jiao Song, Kirankumar Neelasandra SAVANDAIAH, Anthony Chih-Tung Chan | 2023-12-19 |
| 11581166 | Low profile deposition ring for enhanced life | Kirankumar Neelasandra SAVANDAIAH, Jiao Song, David Gunther, Anthony Chih-Tung Chan | 2023-02-14 |
| 11295938 | Multi-radius magnetron for physical vapor deposition (PVD) and methods of use thereof | Jiao Song, Anthony Chih-Tung Chan, David Gunther, Kirankumar Neelasandra SAVANDAIAH | 2022-04-05 |
| 11251024 | Coating for chamber particle reduction | Hsin-wei Tseng, Casey Jane Madsen, Yikai Chen, Halbert Chong | 2022-02-15 |
| 11189472 | Cathode assembly having a dual position magnetron and centrally fed coolant | Kirankumar Neelasandra SAVANDAIAH, Anthony Chih-Tung Chan, Jiao Song, Prashant Prabhakar Prabhu | 2021-11-30 |
| D933726 | Deposition ring for a semiconductor processing chamber | Kirankumar Neelasandra SAVANDAIAH, Jiao Song, David Gunther, Anthony Chih-Tung Chan | 2021-10-19 |
| 6955211 | Method and apparatus for gas temperature control in a semiconductor processing system | Vincent Ku, Ling Chen, Dien-Yeh Wu, Alan Ouye | 2005-10-18 |