| 11361982 |
Methods and apparatus for in-situ cleaning of electrostatic chucks |
Kirankumar Neelasandra SAVANDAIAH, William Johanson, David Gunther |
2022-06-14 |
| 11189472 |
Cathode assembly having a dual position magnetron and centrally fed coolant |
Irena H. Wysok, Kirankumar Neelasandra SAVANDAIAH, Anthony Chih-Tung Chan, Jiao Song |
2021-11-30 |
| D902165 |
Target profile for a physical vapor deposition chamber target |
William Johanson, Kirankumar Neelasandra SAVANDAIAH |
2020-11-17 |
| D894137 |
Target profile for a physical vapor deposition chamber target |
William Johanson, Kirankumar Neelasandra SAVANDAIAH, Anthony Chih-Tung Chan, Siew Kit Hoi |
2020-08-25 |
| 10648071 |
Process kit having a floating shadow ring |
William Johanson, Siew Kit Hoi, John Mazzocco, Kirankumar Neelasandra SAVANDAIAH |
2020-05-12 |
| D877101 |
Target profile for a physical vapor deposition chamber target |
William Johanson, Kirankumar Neelasandra SAVANDAIAH |
2020-03-03 |
| D851613 |
Target profile for a physical vapor deposition chamber target |
William Johanson, Kirankumar Neelasandra SAVANDAIAH, Anthony Chih-Tung Chan, Siew Kit Hoi |
2019-06-18 |
| 9953812 |
Integrated process kit for a substrate processing chamber |
William Johanson, Kirankumar Neelasandra SAVANDAIAH, Xin Wang |
2018-04-24 |
| 9909206 |
Process kit having tall deposition ring and deposition ring clamp |
William Johanson, Kirankumar Neelasandra SAVANDAIAH, Adolph Miller Allen, Xin Wang |
2018-03-06 |
