Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11361982 | Methods and apparatus for in-situ cleaning of electrostatic chucks | Kirankumar Neelasandra SAVANDAIAH, William Johanson, David Gunther | 2022-06-14 |
| 11189472 | Cathode assembly having a dual position magnetron and centrally fed coolant | Irena H. Wysok, Kirankumar Neelasandra SAVANDAIAH, Anthony Chih-Tung Chan, Jiao Song | 2021-11-30 |
| D902165 | Target profile for a physical vapor deposition chamber target | William Johanson, Kirankumar Neelasandra SAVANDAIAH | 2020-11-17 |
| D894137 | Target profile for a physical vapor deposition chamber target | William Johanson, Kirankumar Neelasandra SAVANDAIAH, Anthony Chih-Tung Chan, Siew Kit Hoi | 2020-08-25 |
| 10648071 | Process kit having a floating shadow ring | William Johanson, Siew Kit Hoi, John Mazzocco, Kirankumar Neelasandra SAVANDAIAH | 2020-05-12 |
| D877101 | Target profile for a physical vapor deposition chamber target | William Johanson, Kirankumar Neelasandra SAVANDAIAH | 2020-03-03 |
| D851613 | Target profile for a physical vapor deposition chamber target | William Johanson, Kirankumar Neelasandra SAVANDAIAH, Anthony Chih-Tung Chan, Siew Kit Hoi | 2019-06-18 |
| 9953812 | Integrated process kit for a substrate processing chamber | William Johanson, Kirankumar Neelasandra SAVANDAIAH, Xin Wang | 2018-04-24 |
| 9909206 | Process kit having tall deposition ring and deposition ring clamp | William Johanson, Kirankumar Neelasandra SAVANDAIAH, Adolph Miller Allen, Xin Wang | 2018-03-06 |