Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846013 | Methods and apparatus for extended chamber for through silicon via deposition | David Gunther, Kirankumar Neelasandra SAVANDAIAH, Irena H. Wysok, Anthony Chih-Tung Chan | 2023-12-19 |
| D1007449 | Target profile for a physical vapor deposition chamber target | David Gunther, Kirankumar Neelasandra SAVANDAIAH, Madan Kumar Shimoga Mylarappa, Yue Cui, Nuno Yen-Chu Chen +1 more | 2023-12-12 |
| 11784033 | Methods and apparatus for processing a substrate | Mengxue Wu, Siew Kit Hoi, Jay Min Soh, Yue Cui, Chul Nyoung Lee +1 more | 2023-10-10 |
| 11581166 | Low profile deposition ring for enhanced life | Kirankumar Neelasandra SAVANDAIAH, David Gunther, Irena H. Wysok, Anthony Chih-Tung Chan | 2023-02-14 |
| D966357 | Target profile for a physical vapor deposition chamber target | David Gunther, Kirankumar Neelasandra SAVANDAIAH, Madan Kumar Shimoga Mylarappa | 2022-10-11 |
| 11295938 | Multi-radius magnetron for physical vapor deposition (PVD) and methods of use thereof | Anthony Chih-Tung Chan, David Gunther, Kirankumar Neelasandra SAVANDAIAH, Irena H. Wysok | 2022-04-05 |
| D940765 | Target profile for a physical vapor deposition chamber target | David Gunther, Kirankumar Neelasandra SAVANDAIAH, Madan Kumar Shimoga Mylarappa | 2022-01-11 |
| 11189472 | Cathode assembly having a dual position magnetron and centrally fed coolant | Irena H. Wysok, Kirankumar Neelasandra SAVANDAIAH, Anthony Chih-Tung Chan, Prashant Prabhakar Prabhu | 2021-11-30 |
| D933726 | Deposition ring for a semiconductor processing chamber | Kirankumar Neelasandra SAVANDAIAH, David Gunther, Irena H. Wysok, Anthony Chih-Tung Chan | 2021-10-19 |
| 9978639 | Methods for reducing copper overhang in a feature of a substrate | Siew Kit Hoi, Arvind Sundarrajan | 2018-05-22 |
| 9569489 | Method and apparatus for data preheating | Kun Dai, Huaizhou Li | 2017-02-14 |