Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392023 | Methods and apparatus for depositing amorphous indium tin oxide film | Yaoying ZHONG, Palaniappan Chidambaram, Jaysen Chiam, Li Ying Choo, Jay Min Soh +2 more | 2025-08-19 |
| D1053230 | Sputter target for a physical vapor deposition chamber | Jay Min Soh, Mengxue Wu, Palaniappan Chidambaram | 2024-12-03 |
| 12046460 | Programmable electrostatic chuck to enhance aluminum film morphology | Yaoying ZHONG, Bridger Earl HOERNER | 2024-07-23 |
| 12037676 | Programmable ESC to enhance aluminum film morphology | Yaoying ZHONG, Bridger Earl HOERNER | 2024-07-16 |
| 11784033 | Methods and apparatus for processing a substrate | Mengxue Wu, Jay Min Soh, Yue Cui, Chul Nyoung Lee, Palaniappan Chidambaram +1 more | 2023-10-10 |
| 11761078 | Methods and apparatus for processing a substrate | Mengxue Wu, Jay Min Soh | 2023-09-19 |
| 11674216 | Methods and apparatus for depositing aluminum by physical vapor deposition (PVD) with controlled cooling | Yaoying ZHONG, Xinxin Wang, Zheng Min Clarence Chong | 2023-06-13 |
| 11670485 | Methods and apparatus for depositing aluminum by physical vapor deposition (PVD) | Zhong Yaoying, Xinxin Wang | 2023-06-06 |
| 11581167 | Process kit having tall deposition ring and smaller diameter electrostatic chuck (ESC) for PVD chamber | David Gunther, Kirankumar Neelasandra SAVANDAIAH | 2023-02-14 |
| 11557499 | Methods and apparatus for prevention of component cracking using stress relief layer | Yuichi Wada, Kok Wei Tan, Chul Nyoung Lee, Xinxin Wang, Zheng Min Clarence Chong +2 more | 2023-01-17 |
| D908645 | Sputtering target for a physical vapor deposition chamber | Kirankumar Neelasandra SAVANDAIAH, David Gunther | 2021-01-26 |
| D894137 | Target profile for a physical vapor deposition chamber target | William Johanson, Kirankumar Neelasandra SAVANDAIAH, Anthony Chih-Tung Chan, Prashant Prabhakar Prabhu | 2020-08-25 |
| 10648071 | Process kit having a floating shadow ring | William Johanson, John Mazzocco, Kirankumar Neelasandra SAVANDAIAH, Prashant Prabhakar Prabhu | 2020-05-12 |
| D851613 | Target profile for a physical vapor deposition chamber target | William Johanson, Kirankumar Neelasandra SAVANDAIAH, Anthony Chih-Tung Chan, Prashant Prabhakar Prabhu | 2019-06-18 |
| 9978639 | Methods for reducing copper overhang in a feature of a substrate | Arvind Sundarrajan, Jiao Song | 2018-05-22 |