Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12046460 | Programmable electrostatic chuck to enhance aluminum film morphology | Yaoying ZHONG, Siew Kit Hoi | 2024-07-23 |
| 12037676 | Programmable ESC to enhance aluminum film morphology | Yaoying ZHONG, Siew Kit Hoi | 2024-07-16 |
| 10373864 | Systems and methods for wetting substrates | Paul R. McHugh, Marvin L. Bernt, Thomas H. Oberlitner, Brian Aegerter, Richard W. Plavidal +3 more | 2019-08-06 |
| 10260855 | Electroplating tool with feedback of metal thickness distribution and correction | Todd Egan, Edward W. Budiarto, Robert O. Miller, Abraham Ravid, Robert W. Batz, Jr. +1 more | 2019-04-16 |