| 10373864 |
Systems and methods for wetting substrates |
Paul R. McHugh, Bridger Earl HOERNER, Marvin L. Bernt, Thomas H. Oberlitner, Richard W. Plavidal +3 more |
2019-08-06 |
$24,698,000 |
| 7429537 |
Methods and apparatus for rinsing and drying |
Curt Dundas, Tom Ritzdorf, Gary L. Curtis, Michael Jolley |
2008-09-30 |
$2,597,000 |
| 7399713 |
Selective treatment of microelectric workpiece surfaces |
Curt Dundas, Tom Ritzdorf, Gary L. Curtis, Michael Jolley, Steven L. Peace |
2008-07-15 |
$2,913,000 |
| 7337663 |
Sonic energy process chamber |
Paul Z. Wirth, Dana Scranton |
2008-03-04 |
$2,519,000 |
| 7102763 |
Methods and apparatus for processing microelectronic workpieces using metrology |
Thomas Ritzdorf, Steve Eudy, Gregory J. Wilson, Paul R. McHugh, Robert A. Weaver +2 more |
2006-09-05 |
$3,211,000 |
| 6900132 |
Single workpiece processing system |
Raymon F. Thompson, Jeffry Davis, Randy Harris, Dana Scranton, Ryan Pfeifle +1 more |
2005-05-31 |
$1,672,000 |
| 6794291 |
Reactor for processing a semiconductor wafer |
Steven L. Peace, Gary L. Curtis, Raymon F. Thompson, Curt Dundas |
2004-09-21 |
$3,021,000 |
| 6774056 |
Sonic immersion process system and methods |
Jon Kuntz, Steven L. Peace, Ed Derks |
2004-08-10 |
$971,000 |
| 6692613 |
Reactor for processing a semiconductor wafer |
Steven L. Peace, Gary L. Curtis, Raymon F. Thompson, Curt Dundas |
2004-02-17 |
$2,095,000 |
| 6632292 |
Selective treatment of microelectronic workpiece surfaces |
Curt Dundas, Tom Ritzdorf, Gary L. Curtis, Michael Jolley |
2003-10-14 |
$1,224,000 |
| 6447633 |
Reactor for processing a semiconductor wafer |
Steven L. Peace, Gary L. Curtis, Raymon F. Thompson, Curt Dundas |
2002-09-10 |
$704,000 |
| 6423642 |
Reactor for processing a semiconductor wafer |
Steven L. Peace, Gary L. Curtis, Raymon F. Thompson, Curt Dundas |
2002-07-23 |
$2,852,000 |
| 6413436 |
Selective treatment of the surface of a microelectronic workpiece |
Curt Dundas, Michael Jolley, Tom Ritzdorf, Steven L. Peace, Gary L. Curtis +1 more |
2002-07-02 |
$1,773,000 |
