Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7934898 | High throughput semiconductor wafer processing | Randy Harris, Paul Z. Wirth | 2011-05-03 |
| 7524406 | Processing apparatus including a reactor for electrochemically etching microelectronic workpiece | Daniel J. Woodruff, James J. Erickson, Thomas H. Oberlitner, Matthew Egloff | 2009-04-28 |
| 7294243 | Contact assemblies for electrochemical processing of microelectronic workpieces and method of making thereof | Nolan L. Zimmerman, Gregory J. Wilson | 2007-11-13 |
| 7161689 | Apparatus and method for processing a microelectronic workpiece using metrology | Thomas Ritzdorf, Gregory J. Wilson, Paul R. McHugh | 2007-01-09 |
| 7102763 | Methods and apparatus for processing microelectronic workpieces using metrology | Thomas Ritzdorf, Gregory J. Wilson, Paul R. McHugh, Robert A. Weaver, Brian Aegerter +2 more | 2006-09-05 |
| 6962649 | Contact assemblies, methods for making contact assemblies, and machines with contact assemblies for electrochemical processing of microelectronic workpieces | Gregory J. Wilson, John M. Pedersen | 2005-11-08 |
| 6921467 | Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces | Kyle M. Hanson, Thomas Ritzdorf, Gregory J. Wilson, Daniel J. Woodruff, Randy Harris +4 more | 2005-07-26 |
| 6916412 | Adaptable electrochemical processing chamber | Daniel J. Woodruff, Kyle M. Hanson, Curtis Weber, Randy Harris | 2005-07-12 |
| 6773559 | Processing apparatus including a reactor for electrochemically etching a microelectronic workpiece | Daniel J. Woodruff, James J. Erickson, Thomas H. Oberlitner, Matthew Egloff | 2004-08-10 |
| 6747734 | Apparatus and method for processing a microelectronic workpiece using metrology | Thomas Ritzdorf, Gregory J. Wilson, Paul R. McHugh | 2004-06-08 |
| 6632334 | Distributed power supplies for microelectronic workpiece processing tools | Timothy Anderson, Tim McGlenn | 2003-10-14 |
| 6428673 | Apparatus and method for electrochemical processing of a microelectronic workpiece, capable of modifying processing based on metrology | Thomas Ritzdorf, Gregory J. Wilson, Paul R. McHugh | 2002-08-06 |