| 7866292 |
Apparatus and methods for continuous variable valve timing |
Rikki Scott LaBere |
2011-01-11 |
|
| 7332066 |
Apparatus and method for electrochemically depositing metal on a semiconductor workpiece |
Linlin Chen, Gregory J. Wilson, Paul R. McHugh, Thomas Ritzdorf |
2008-02-19 |
$2,542,000 |
| 7189318 |
Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
Gregory J. Wilson, Paul R. McHugh, Thomas Ritzdorf |
2007-03-13 |
$4,137,000 |
| 7160421 |
Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
Gregory J. Wilson, Paul R. McHugh, Thomas Ritzdorf |
2007-01-09 |
$2,040,000 |
| 7127828 |
Lockdown rotor for a processing machine |
Ronald Schlagenhauser |
2006-10-31 |
$3,595,000 |
| 7115196 |
Apparatus and method for electrochemically depositing metal on a semiconductor workpiece |
Linlin Chen, Gregory J. Wilson, Paul R. McHugh, Thomas Ritzdorf |
2006-10-03 |
$1,688,000 |
| 7102763 |
Methods and apparatus for processing microelectronic workpieces using metrology |
Thomas Ritzdorf, Steve Eudy, Gregory J. Wilson, Paul R. McHugh, Brian Aegerter +2 more |
2006-09-05 |
$3,211,000 |
| 7020537 |
Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
Gregory J. Wilson, Paul R. McHugh, Thomas Ritzdorf |
2006-03-28 |
$2,898,000 |
| 6881309 |
Diffuser with spiral opening pattern for electroplating reactor vessel |
Kyle M. Hanson, Jerry Simchuk, Raymon F. Thompson |
2005-04-19 |
$3,551,000 |
| 6861027 |
Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature |
Paul R. McHugh, Gregory J. Wilson |
2005-03-01 |
$3,984,000 |
| 6780374 |
Method and apparatus for processing a microelectronic workpiece at an elevated temperature |
Gregory J. Wilson, Paul R. McHugh |
2004-08-24 |
$3,171,000 |
| 6565729 |
Method for electrochemically depositing metal on a semiconductor workpiece |
Linlin Chen, Gregory J. Wilson, Paul R. McHugh, Thomas Ritzdorf |
2003-05-20 |
$2,589,000 |
| 6471913 |
Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature |
Paul R. McHugh, Gregory J. Wilson |
2002-10-29 |
$1,335,000 |
| 6370791 |
Processing machine with lockdown rotor |
Ronald Schlagenhauser |
2002-04-16 |
$6,012,000 |
| 6254742 |
Diffuser with spiral opening pattern for an electroplating reactor vessel |
Kyle M. Hanson, Jerry Simchuk, Raymon F. Thompson |
2001-07-03 |
$6,727,000 |
| 6164963 |
Semiconductor furnace processing vessel base |
— |
2000-12-26 |
|
| 6030208 |
Thermal processor |
Victor J. Williams, Coby Scott GROVE |
2000-02-29 |
$11,924,000 |
| 5947718 |
Semiconductor processing furnace |
— |
1999-09-07 |
$3,129,000 |
| 5908292 |
Semiconductor processing furnace outflow cooling system |
John Z. Smith, Martin Jones, Paul R. McHugh |
1999-06-01 |
$2,360,000 |
| 5904478 |
Semiconductor processing furnace heating subassembly |
William D. McEntire, Kevin B. Peck |
1999-05-18 |
$2,265,000 |
| 5846073 |
Semiconductor furnace processing vessel base |
— |
1998-12-08 |
$1,511,000 |
| 4703741 |
Gasoline combustion engine |
Jeffrey M. Curran, Jeffrey D. Weaver |
1987-11-03 |
|
| D282864 |
Semiautomatic rifle |
— |
1986-03-04 |
|