Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11710647 | Hyperbaric clean method and apparatus for cleaning semiconductor chamber components | Richard W. Plavidal, Scott Osterman, David W. Groechel, Gang Peng | 2023-07-25 |
| 5908292 | Semiconductor processing furnace outflow cooling system | Martin Jones, Paul R. McHugh, Robert A. Weaver | 1999-06-01 |