| 7645366 |
Microelectronic workpiece holders and contact assemblies for use therewith |
Kyle M. Hanson, Jurek K. Koziol, Michal A. Zmaj |
2010-01-12 |
| 7288172 |
Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing |
James J. Erickson |
2007-10-30 |
| 7288179 |
Method for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing |
James J. Erickson |
2007-10-30 |
| 7048841 |
Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces |
Robert W. Batz, Jr., John L. Klocke, Linlin Chen |
2006-05-23 |
| 6962649 |
Contact assemblies, methods for making contact assemblies, and machines with contact assemblies for electrochemical processing of microelectronic workpieces |
Gregory J. Wilson, Steve Eudy |
2005-11-08 |
| 6939448 |
Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces |
Robert W. Batz, Jr., John L. Klocke, Linlin Chen |
2005-09-06 |
| 6911127 |
Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces |
Robert W. Batz, Jr., John L. Klocke, Linlin Chen |
2005-06-28 |
| 6869510 |
Methods and apparatus for processing the surface of a microelectronic workpiece |
Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, Vladimir Zila |
2005-03-22 |
| 6773560 |
Dry contact assemblies and plating machines with dry contact assemblies for plating microelectronic workpieces |
Jeremy Willey, Daniel J. Woodruff |
2004-08-10 |
| 6699373 |
Apparatus for processing the surface of a microelectronic workpiece |
Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, Vladimir Zila |
2004-03-02 |
| 6673216 |
Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing |
James J. Erickson |
2004-01-06 |
| 6645356 |
Methods and apparatus for processing the surface of a microelectronic workpiece |
Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, Vladimir Zila |
2003-11-11 |
| 6527925 |
Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces |
Robert W. Batz, Jr., John L. Klocke, Linlin Chen |
2003-03-04 |
| 6471460 |
Apparatus for processing a microelectronic workpiece including a workpiece cassette inventory assembly |
Kyle M. Hanson |
2002-10-29 |
| 6309524 |
Methods and apparatus for processing the surface of a microelectronic workpiece |
Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, Vladimir Zila |
2001-10-30 |
| 6309520 |
Methods and apparatus for processing the surface of a microelectronic workpiece |
Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, Vladimir Zila |
2001-10-30 |
| 6303010 |
Methods and apparatus for processing the surface of a microelectronic workpiece |
Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, Vladimir Zila |
2001-10-16 |
| 5660517 |
Semiconductor processing system with wafer container docking and loading station |
Raymon F. Thompson, Robert W. Berner, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright +1 more |
1997-08-26 |