Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7645366 | Microelectronic workpiece holders and contact assemblies for use therewith | Kyle M. Hanson, Jurek K. Koziol, Michal A. Zmaj | 2010-01-12 |
| 7288172 | Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing | James J. Erickson | 2007-10-30 |
| 7288179 | Method for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing | James J. Erickson | 2007-10-30 |
| 7048841 | Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces | Robert W. Batz, Jr., John L. Klocke, Linlin Chen | 2006-05-23 |
| 6962649 | Contact assemblies, methods for making contact assemblies, and machines with contact assemblies for electrochemical processing of microelectronic workpieces | Gregory J. Wilson, Steve Eudy | 2005-11-08 |
| 6939448 | Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces | Robert W. Batz, Jr., John L. Klocke, Linlin Chen | 2005-09-06 |
| 6911127 | Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces | Robert W. Batz, Jr., John L. Klocke, Linlin Chen | 2005-06-28 |
| 6869510 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, Vladimir Zila | 2005-03-22 |
| 6773560 | Dry contact assemblies and plating machines with dry contact assemblies for plating microelectronic workpieces | Jeremy Willey, Daniel J. Woodruff | 2004-08-10 |
| 6699373 | Apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, Vladimir Zila | 2004-03-02 |
| 6673216 | Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing | James J. Erickson | 2004-01-06 |
| 6645356 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, Vladimir Zila | 2003-11-11 |
| 6527925 | Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces | Robert W. Batz, Jr., John L. Klocke, Linlin Chen | 2003-03-04 |
| 6471460 | Apparatus for processing a microelectronic workpiece including a workpiece cassette inventory assembly | Kyle M. Hanson | 2002-10-29 |
| 6309524 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, Vladimir Zila | 2001-10-30 |
| 6309520 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, Vladimir Zila | 2001-10-30 |
| 6303010 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, Vladimir Zila | 2001-10-16 |
| 5660517 | Semiconductor processing system with wafer container docking and loading station | Raymon F. Thompson, Robert W. Berner, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright +1 more | 1997-08-26 |