Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12312702 | Plating systems having reduced air entrainment | Cameron Law, Daniel Durado, Richard W. Plavidal | 2025-05-27 |
| 11739434 | Plating systems having reduced air entrainment | Cameron Law, Daniel Durado | 2023-08-29 |
| 10373864 | Systems and methods for wetting substrates | Paul R. McHugh, Bridger Earl HOERNER, Marvin L. Bernt, Brian Aegerter, Richard W. Plavidal +3 more | 2019-08-06 |
| 9469913 | Closed loop electrolyte analyzer | Cameron Law, Justin Boucher | 2016-10-18 |
| 7524406 | Processing apparatus including a reactor for electrochemically etching microelectronic workpiece | Daniel J. Woodruff, Steve Eudy, James J. Erickson, Matthew Egloff | 2009-04-28 |
| 7294244 | Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece | Kyle M. Hanson | 2007-11-13 |
| 7281741 | End-effectors for handling microelectronic workpieces | Daniel J. Woodruff, Randy Harris, James J. Erickson, Douglas W. Carr | 2007-10-16 |
| 7138016 | Semiconductor processing apparatus | Timothy J. Reardon, Craig P. Meuchel, Aleksander Owczarz, Raymon F. Thompson | 2006-11-21 |
| 7094291 | Semiconductor processing apparatus | Timothy J. Reardon, Craig P. Meuchel, Aleksander Owczarz, Raymon F. Thompson | 2006-08-22 |
| 6869510 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Linlin Chen, John M. Pedersen, Vladimir Zila | 2005-03-22 |
| 6773559 | Processing apparatus including a reactor for electrochemically etching a microelectronic workpiece | Daniel J. Woodruff, Steve Eudy, James J. Erickson, Matthew Egloff | 2004-08-10 |
| 6699373 | Apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Linlin Chen, John M. Pedersen, Vladimir Zila | 2004-03-02 |
| 6645356 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Linlin Chen, John M. Pedersen, Vladimir Zila | 2003-11-11 |
| 6547937 | Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece | Kyle M. Hanson | 2003-04-15 |
| 6375741 | Semiconductor processing spray coating apparatus | Timothy J. Reardon, Craig P. Meuchel | 2002-04-23 |
| 6322119 | Robots for microelectronic workpiece handling | Wayne J. Schmidt | 2001-11-27 |
| 6318951 | Robots for microelectronic workpiece handling | Wayne J. Schmidt | 2001-11-20 |
| 6309520 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Linlin Chen, John M. Pedersen, Vladimir Zila | 2001-10-30 |
| 6309524 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Linlin Chen, John M. Pedersen, Vladimir Zila | 2001-10-30 |
| 6303010 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Linlin Chen, John M. Pedersen, Vladimir Zila | 2001-10-16 |
| 6066575 | Semiconductor processing spray coating apparatus | Timothy J. Reardon, Craig P. Meuchel | 2000-05-23 |
| 5658387 | Semiconductor processing spray coating apparatus | Timothy J. Reardon, Craig P. Meuchel | 1997-08-19 |
| 5584310 | Semiconductor processing with non-jetting fluid stream discharge array | Eric J. Bergman | 1996-12-17 |
| 5489341 | Semiconductor processing with non-jetting fluid stream discharge array | Eric J. Bergman | 1996-02-06 |