| 7305999 |
Centrifugal spray processor and retrofit kit |
Trevor Henke, Marvin L. Bernt |
2007-12-11 |
| 7138016 |
Semiconductor processing apparatus |
Timothy J. Reardon, Thomas H. Oberlitner, Aleksander Owczarz, Raymon F. Thompson |
2006-11-21 |
| 7094291 |
Semiconductor processing apparatus |
Timothy J. Reardon, Thomas H. Oberlitner, Aleksander Owczarz, Raymon F. Thompson |
2006-08-22 |
| 6745494 |
Method and apparatus for processing wafers under pressure |
Eric J. Bergman, Ian Sharp, H. Frederick Woods |
2004-06-08 |
| 6543156 |
Method and apparatus for high-pressure wafer processing and drying |
Eric J. Bergman, Ian Sharp, H. Frederick Woods |
2003-04-08 |
| 6488038 |
Method for cleaning semiconductor substrates |
Eric J. Bergman, Ian Sharp |
2002-12-03 |
| 6375741 |
Semiconductor processing spray coating apparatus |
Timothy J. Reardon, Thomas H. Oberlitner |
2002-04-23 |
| 6357142 |
Method and apparatus for high-pressure wafer processing and drying |
Eric J. Bergman, Ian Sharp, H. Frederick Woods |
2002-03-19 |
| 6286231 |
Method and apparatus for high-pressure wafer processing and drying |
Eric J. Bergman, Ian Sharp, H. Frederick Woods |
2001-09-11 |
| 6066575 |
Semiconductor processing spray coating apparatus |
Timothy J. Reardon, Thomas H. Oberlitner |
2000-05-23 |
| 5658387 |
Semiconductor processing spray coating apparatus |
Timothy J. Reardon, Thomas H. Oberlitner |
1997-08-19 |