Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7524406 | Processing apparatus including a reactor for electrochemically etching microelectronic workpiece | Daniel J. Woodruff, Steve Eudy, James J. Erickson, Thomas H. Oberlitner | 2009-04-28 |
| 7313462 | Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces | Daniel J. Woodruff, David P. Mattson, James J. Erickson | 2007-12-25 |
| 7198694 | Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems | Daniel J. Woodruff, Jeffry Davis, Randy Harris, David P. Mattson, James J. Erickson | 2007-04-03 |
| 6773559 | Processing apparatus including a reactor for electrochemically etching a microelectronic workpiece | Daniel J. Woodruff, Steve Eudy, James J. Erickson, Thomas H. Oberlitner | 2004-08-10 |