Issued Patents All Time
Showing 25 most recent of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8028978 | Wafer handling system | Gordon Nelson, Raymon F. Thompson, Eric J. Bergman | 2011-10-04 |
| 7541299 | Method and apparatus for thermally processing microelectronic workpieces | Paul Z. Wirth | 2009-06-02 |
| 7520286 | Apparatus and method for cleaning and drying a container for semiconductor workpieces | Randy Harris | 2009-04-21 |
| 7371306 | Integrated tool with interchangeable wet processing components for processing microfeature workpieces | Randy Harris | 2008-05-13 |
| 7278813 | Automated processing system | Gordon Nelson, Daniel P. Bexten | 2007-10-09 |
| 7198694 | Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems | Daniel J. Woodruff, Randy Harris, David P. Mattson, James J. Erickson, Matthew Egloff | 2007-04-03 |
| 7144813 | Method and apparatus for thermally processing microelectronic workpieces | Paul Z. Wirth | 2006-12-05 |
| 7067018 | Automated system for handling and processing wafers within a carrier | — | 2006-06-27 |
| 7060138 | Methods for cleaning wafer containers | Kert Dolechek | 2006-06-13 |
| 6942738 | Automated semiconductor processing system | Gordon Nelson, Daniel P. Bexten | 2005-09-13 |
| 6900132 | Single workpiece processing system | Raymon F. Thompson, Randy Harris, Dana Scranton, Ryan Pfeifle, Steven A. Peace +1 more | 2005-05-31 |
| 6895981 | Cross flow processor | Kert Dolechek | 2005-05-24 |
| 6866460 | Apparatus and method for loading of carriers containing semiconductor wafers and other media | Andro Purnomohadi, Daniel Thomas Potter | 2005-03-15 |
| 6830057 | Wafer container cleaning system | Kert Dolechek | 2004-12-14 |
| 6799932 | Semiconductor wafer processing apparatus | Kert Dolechek, Gary L. Curtis | 2004-10-05 |
| 6736148 | Automated semiconductor processing system | Kevin P. Meyer, Kert Dolechek | 2004-05-18 |
| 6723174 | Automated semiconductor processing system | Gordon Nelson, Daniel P. Bexten | 2004-04-20 |
| 6652219 | Semiconductor wafer processing apparatus having improved wafer input/output handling system | Kert Dolechek, Gary L. Curtis | 2003-11-25 |
| 6599075 | Semiconductor wafer processing apparatus | Kert Dolechek, Gary L. Curtis | 2003-07-29 |
| 6575689 | Automated semiconductor immersion processing system | Randy Harris, David Peterson | 2003-06-10 |
| 6572320 | Robot for handling workpieces in an automated processing system | — | 2003-06-03 |
| 6536131 | Wafer handling system | — | 2003-03-25 |
| 6454514 | Microelectronic workpiece support and apparatus using the support | — | 2002-09-24 |
| 6447232 | Semiconductor wafer processing apparatus having improved wafer input/output handling system | Kert Dolechek, Gary L. Curtis | 2002-09-10 |
| 6439824 | Automated semiconductor immersion processing system | Randy Harris, David Peterson | 2002-08-27 |