| 8028978 |
Wafer handling system |
Gordon Nelson, Raymon F. Thompson, Eric J. Bergman |
2011-10-04 |
|
| 7541299 |
Method and apparatus for thermally processing microelectronic workpieces |
Paul Z. Wirth |
2009-06-02 |
$4,117,000 |
| 7520286 |
Apparatus and method for cleaning and drying a container for semiconductor workpieces |
Randy Harris |
2009-04-21 |
$2,336,000 |
| 7371306 |
Integrated tool with interchangeable wet processing components for processing microfeature workpieces |
Randy Harris |
2008-05-13 |
$1,243,000 |
| 7278813 |
Automated processing system |
Gordon Nelson, Daniel P. Bexten |
2007-10-09 |
$1,360,000 |
| 7198694 |
Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems |
Daniel J. Woodruff, Randy Harris, David P. Mattson, James J. Erickson, Matthew Egloff |
2007-04-03 |
$4,152,000 |
| 7144813 |
Method and apparatus for thermally processing microelectronic workpieces |
Paul Z. Wirth |
2006-12-05 |
$1,506,000 |
| 7067018 |
Automated system for handling and processing wafers within a carrier |
— |
2006-06-27 |
$2,747,000 |
| 7060138 |
Methods for cleaning wafer containers |
Kert Dolechek |
2006-06-13 |
$2,651,000 |
| 6942738 |
Automated semiconductor processing system |
Gordon Nelson, Daniel P. Bexten |
2005-09-13 |
$2,547,000 |
| 6900132 |
Single workpiece processing system |
Raymon F. Thompson, Randy Harris, Dana Scranton, Ryan Pfeifle, Steven A. Peace +1 more |
2005-05-31 |
$1,672,000 |
| 6895981 |
Cross flow processor |
Kert Dolechek |
2005-05-24 |
$3,154,000 |
| 6866460 |
Apparatus and method for loading of carriers containing semiconductor wafers and other media |
Andro Purnomohadi, Daniel Thomas Potter |
2005-03-15 |
$3,872,000 |
| 6830057 |
Wafer container cleaning system |
Kert Dolechek |
2004-12-14 |
$1,814,000 |
| 6799932 |
Semiconductor wafer processing apparatus |
Kert Dolechek, Gary L. Curtis |
2004-10-05 |
$3,047,000 |
| 6736148 |
Automated semiconductor processing system |
Kevin P. Meyer, Kert Dolechek |
2004-05-18 |
$2,298,000 |
| 6723174 |
Automated semiconductor processing system |
Gordon Nelson, Daniel P. Bexten |
2004-04-20 |
$5,563,000 |
| 6652219 |
Semiconductor wafer processing apparatus having improved wafer input/output handling system |
Kert Dolechek, Gary L. Curtis |
2003-11-25 |
$2,801,000 |
| 6599075 |
Semiconductor wafer processing apparatus |
Kert Dolechek, Gary L. Curtis |
2003-07-29 |
$1,636,000 |
| 6575689 |
Automated semiconductor immersion processing system |
Randy Harris, David Peterson |
2003-06-10 |
$3,115,000 |
| 6572320 |
Robot for handling workpieces in an automated processing system |
— |
2003-06-03 |
$3,194,000 |
| 6536131 |
Wafer handling system |
— |
2003-03-25 |
$1,115,000 |
| 6454514 |
Microelectronic workpiece support and apparatus using the support |
— |
2002-09-24 |
$1,058,000 |
| 6447232 |
Semiconductor wafer processing apparatus having improved wafer input/output handling system |
Kert Dolechek, Gary L. Curtis |
2002-09-10 |
$704,000 |
| 6439824 |
Automated semiconductor immersion processing system |
Randy Harris, David Peterson |
2002-08-27 |
$1,500,000 |