Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7337663 | Sonic energy process chamber | Paul Z. Wirth, Brian Aegerter | 2008-03-04 |
| 7005010 | Multi-process system | Eric J. Bergman, Erik Lund, Worm Lund | 2006-02-28 |
| 6900132 | Single workpiece processing system | Raymon F. Thompson, Jeffry Davis, Randy Harris, Ryan Pfeifle, Steven A. Peace +1 more | 2005-05-31 |
| 6875284 | Side-specific cleaning method and apparatus | — | 2005-04-05 |
| 6869486 | Methods for removing metallic contamination from wafer containers | Ronald Breese, C. Bryer, Eric J. Bergman | 2005-03-22 |
| 6691720 | Multi-process system with pivoting process chamber | Eric J. Bergman, Eric Lund, Gil Lund | 2004-02-17 |
| 6681499 | Substrate drying method for use with a surface tension effect dryer with porous vessel walls | Ian Sharp | 2004-01-27 |
| 6668844 | Systems and methods for processing workpieces | Eric Lund, Joe Lanfrankie, Gil Lund, Eric J. Bergman | 2003-12-30 |
| 6502591 | Surface tension effect dryer with porous vessel walls | Ian Sharp | 2003-01-07 |
| 6427359 | Systems and methods for processing workpieces | Eric J. Bergman, Eric Lund, Gil Lund | 2002-08-06 |
| 6395101 | Single semiconductor wafer processor | Gary L. Curtis | 2002-05-28 |
| 6374837 | Single semiconductor wafer processor | Gary L. Curtis | 2002-04-23 |