| 7337663 |
Sonic energy process chamber |
Paul Z. Wirth, Brian Aegerter |
2008-03-04 |
| 7005010 |
Multi-process system |
Eric J. Bergman, Erik Lund, Worm Lund |
2006-02-28 |
| 6900132 |
Single workpiece processing system |
Raymon F. Thompson, Jeffry Davis, Randy Harris, Ryan Pfeifle, Steven A. Peace +1 more |
2005-05-31 |
| 6875284 |
Side-specific cleaning method and apparatus |
— |
2005-04-05 |
| 6869486 |
Methods for removing metallic contamination from wafer containers |
Ronald Breese, C. Bryer, Eric J. Bergman |
2005-03-22 |
| 6691720 |
Multi-process system with pivoting process chamber |
Eric J. Bergman, Eric Lund, Gil Lund |
2004-02-17 |
| 6681499 |
Substrate drying method for use with a surface tension effect dryer with porous vessel walls |
Ian Sharp |
2004-01-27 |
| 6668844 |
Systems and methods for processing workpieces |
Eric Lund, Joe Lanfrankie, Gil Lund, Eric J. Bergman |
2003-12-30 |
| 6502591 |
Surface tension effect dryer with porous vessel walls |
Ian Sharp |
2003-01-07 |
| 6427359 |
Systems and methods for processing workpieces |
Eric J. Bergman, Eric Lund, Gil Lund |
2002-08-06 |
| 6395101 |
Single semiconductor wafer processor |
Gary L. Curtis |
2002-05-28 |
| 6374837 |
Single semiconductor wafer processor |
Gary L. Curtis |
2002-04-23 |