Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Integrated tool with interchangeable wet processing components for processing microfeature workpieces

Integrated tool with interchangeable wet processing components for processing microfeature workpieces

US Patent 7371306 · Granted May 13, 2008

Estimated economic value: $1,243,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Modular mainframe layout for supporting multiple semiconductor process modules o2024
Modular mainframe layout for supporting multiple semiconductor process modules o2024
Method and apparatus for post exposure processing of photoresist wafers2024
Method and apparatus for post exposure processing of photoresist wafers2021
Microelectronic substrate electro processing system2020
Method and apparatus for post exposure processing of photoresist wafers2019
Creating and using an integrated technical data package2019
Systems and methods for wetting substrates2019
Method and apparatus for post exposure processing of photoresist wafers2019
Wafer electroplating chuck assembly2019
Microelectronic substrate electro processing system2018
Wafer processing system with chuck assembly maintenance module2017