Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Automated semiconductor processing system

Automated semiconductor processing system

US Patent 6942738 · Granted Sep 13, 2005

Estimated economic value: $2,547,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Wheeled vehicle2020
Wafer handling system2011
Wafer handling system2011
Method and apparatus for thermally processing microelectronic workpieces2009
Apparatus and method for cleaning and drying a container for semiconductor workp2009
Integrated tool with interchangeable wet processing components for processing mi2008
Automated processing system2007
Automated processing system2007
Automated processing system2007
Integrated tool with interchangeable wet processing components for processing mi2007
Centrifugal swing arm spray processor2006
Method and apparatus for thermally processing microelectronic workpieces2006