Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7313462 | Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces | Daniel J. Woodruff, James J. Erickson, Matthew Egloff | 2007-12-25 |
| 7198694 | Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems | Daniel J. Woodruff, Jeffry Davis, Randy Harris, James J. Erickson, Matthew Egloff | 2007-04-03 |