Issued Patents All Time
Showing 25 most recent of 85 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11899366 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more | 2024-02-13 |
| 11112697 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more | 2021-09-07 |
| 10837119 | Microelectronic substrate electro processing system | Robert B. Moore, David Silvetti, Paul Z. Wirth, Randy Harris, Gregory J. Wilson | 2020-11-17 |
| 10494731 | Electroplating dynamic edge control | Paul R. McHugh, Gregory J. Wilson, Marvin L. Bernt | 2019-12-03 |
| 10474033 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more | 2019-11-12 |
| 10260855 | Electroplating tool with feedback of metal thickness distribution and correction | Todd Egan, Edward W. Budiarto, Robert O. Miller, Abraham Ravid, Bridger Earl HOERNER +1 more | 2019-04-16 |
| 10203604 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more | 2019-02-12 |
| 10047453 | Electroplating apparatus | Gregory J. Wilson, Paul R. McHugh | 2018-08-14 |
| 9309603 | Component cleaning in a metal plating apparatus | — | 2016-04-12 |
| 9068272 | Electroplating processor with thin membrane support | — | 2015-06-30 |
| 8968533 | Electroplating processor with geometric electrolyte flow path | Randy Harris, Jeffrey I. Turner, Gregory J. Wilson, Paul R. McHugh | 2015-03-03 |
| 8562752 | Single workpiece processing chamber | — | 2013-10-22 |
| 8500968 | Deplating contacts in an electrochemical plating apparatus | Nolan L. Zimmerman, John L. Klocke, Klaus H. Pfeifer, Kyle M. Hanson, Matthew Herset | 2013-08-06 |
| 8313631 | Apparatus and methods for electrochemical processing of microfeature wafers | Paul R. McHugh, Gregory J. Wilson | 2012-11-20 |
| 8118044 | Single workpiece processing chamber with tilting load/unload upper rim | — | 2012-02-21 |
| 8104488 | Single side workpiece processing | Jason Rye, Kyle M. Hanson | 2012-01-31 |
| 8082932 | Single side workpiece processing | Jason Rye | 2011-12-27 |
| 7935230 | Electro-chemical processor | Paul R. McHugh, Gregory J. Wilson, Kyle M. Hanson, Nigel Stewart, Erik Lund +1 more | 2011-05-03 |
| 7931786 | Apparatus and method for agitating liquids in wet chemical processing of microfeature workpieces | Gregory J. Wilson, Paul R. McHugh | 2011-04-26 |
| 7927469 | Electro-chemical processor | Nigel Stewart, Paul R. McHugh, Gregory J. Wilson, Kyle M. Hanson, Erik Lund +1 more | 2011-04-19 |
| 7909967 | Electro-chemical processor | Paul R. McHugh, Gregory J. Wilson, Kyle M. Hanson, Erik Lund, Steven L. Peace | 2011-03-22 |
| 7842173 | Apparatus and methods for electrochemical processing of microfeature wafers | Paul R. McHugh, Gregory J. Wilson | 2010-11-30 |
| 7531060 | Integrated tool assemblies with intermediate processing modules for processing of microfeature workpieces | Paul Z. Wirth | 2009-05-12 |
| 7524406 | Processing apparatus including a reactor for electrochemically etching microelectronic workpiece | Steve Eudy, James J. Erickson, Thomas H. Oberlitner, Matthew Egloff | 2009-04-28 |
| 7420690 | End point detection in workpiece processing | Marvin L. Bernt | 2008-09-02 |