| 11899366 |
Method and apparatus for post exposure processing of photoresist wafers |
Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more |
2024-02-13 |
$47,589,000 |
| 11112697 |
Method and apparatus for post exposure processing of photoresist wafers |
Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more |
2021-09-07 |
$49,370,000 |
| 10837119 |
Microelectronic substrate electro processing system |
Robert B. Moore, David Silvetti, Paul Z. Wirth, Randy Harris, Gregory J. Wilson |
2020-11-17 |
$41,112,000 |
| 10494731 |
Electroplating dynamic edge control |
Paul R. McHugh, Gregory J. Wilson, Marvin L. Bernt |
2019-12-03 |
$22,017,000 |
| 10474033 |
Method and apparatus for post exposure processing of photoresist wafers |
Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more |
2019-11-12 |
$41,829,000 |
| 10260855 |
Electroplating tool with feedback of metal thickness distribution and correction |
Todd Egan, Edward W. Budiarto, Robert O. Miller, Abraham Ravid, Bridger Earl HOERNER +1 more |
2019-04-16 |
$29,421,000 |
| 10203604 |
Method and apparatus for post exposure processing of photoresist wafers |
Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more |
2019-02-12 |
$37,465,000 |
| 10047453 |
Electroplating apparatus |
Gregory J. Wilson, Paul R. McHugh |
2018-08-14 |
$24,993,000 |
| 9309603 |
Component cleaning in a metal plating apparatus |
— |
2016-04-12 |
$12,337,000 |
| 9068272 |
Electroplating processor with thin membrane support |
— |
2015-06-30 |
$11,421,000 |
| 8968533 |
Electroplating processor with geometric electrolyte flow path |
Randy Harris, Jeffrey I. Turner, Gregory J. Wilson, Paul R. McHugh |
2015-03-03 |
$11,301,000 |
| 8562752 |
Single workpiece processing chamber |
— |
2013-10-22 |
$10,239,000 |
| 8500968 |
Deplating contacts in an electrochemical plating apparatus |
Nolan L. Zimmerman, John L. Klocke, Klaus H. Pfeifer, Kyle M. Hanson, Matthew Herset |
2013-08-06 |
$5,239,000 |
| 8313631 |
Apparatus and methods for electrochemical processing of microfeature wafers |
Paul R. McHugh, Gregory J. Wilson |
2012-11-20 |
$4,897,000 |
| 8118044 |
Single workpiece processing chamber with tilting load/unload upper rim |
— |
2012-02-21 |
$13,903,000 |
| 8104488 |
Single side workpiece processing |
Jason Rye, Kyle M. Hanson |
2012-01-31 |
$17,613,000 |
| 8082932 |
Single side workpiece processing |
Jason Rye |
2011-12-27 |
$8,284,000 |
| 7935230 |
Electro-chemical processor |
Paul R. McHugh, Gregory J. Wilson, Kyle M. Hanson, Nigel Stewart, Erik Lund +1 more |
2011-05-03 |
|
| 7931786 |
Apparatus and method for agitating liquids in wet chemical processing of microfeature workpieces |
Gregory J. Wilson, Paul R. McHugh |
2011-04-26 |
|
| 7927469 |
Electro-chemical processor |
Nigel Stewart, Paul R. McHugh, Gregory J. Wilson, Kyle M. Hanson, Erik Lund +1 more |
2011-04-19 |
|
| 7909967 |
Electro-chemical processor |
Paul R. McHugh, Gregory J. Wilson, Kyle M. Hanson, Erik Lund, Steven L. Peace |
2011-03-22 |
|
| 7842173 |
Apparatus and methods for electrochemical processing of microfeature wafers |
Paul R. McHugh, Gregory J. Wilson |
2010-11-30 |
|
| 7531060 |
Integrated tool assemblies with intermediate processing modules for processing of microfeature workpieces |
Paul Z. Wirth |
2009-05-12 |
$3,511,000 |
| 7524406 |
Processing apparatus including a reactor for electrochemically etching microelectronic workpiece |
Steve Eudy, James J. Erickson, Thomas H. Oberlitner, Matthew Egloff |
2009-04-28 |
$3,172,000 |
| 7420690 |
End point detection in workpiece processing |
Marvin L. Bernt |
2008-09-02 |
$2,918,000 |
