Issued Patents All Time
Showing 26–50 of 85 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7393439 | Integrated microfeature workpiece processing tools with registration systems for paddle reactors | Paul R. McHugh, Gregory J. Wilson, Nolan L. Zimmerman, James J. Erickson | 2008-07-01 |
| 7390382 | Reactors having multiple electrodes and/or enclosed reciprocating paddles, and associated methods | Paul R. McHugh, Gregory J. Wilson, Nolan L. Zimmerman, James J. Erickson | 2008-06-24 |
| 7390383 | Paddles and enclosures for enhancing mass transfer during processing of microfeature workpieces | Paul R. McHugh, Gregory J. Wilson, Nolan L. Zimmerman, James J. Erickson | 2008-06-24 |
| 7357850 | Electroplating apparatus with segmented anode array | Kyle M. Hanson | 2008-04-15 |
| 7334826 | End-effectors for handling microelectronic wafers | Randy Harris, James J. Erickson, Douglas W. Carr | 2008-02-26 |
| 7313462 | Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces | David P. Mattson, James J. Erickson, Matthew Egloff | 2007-12-25 |
| 7281741 | End-effectors for handling microelectronic workpieces | Thomas H. Oberlitner, Randy Harris, James J. Erickson, Douglas W. Carr | 2007-10-16 |
| 7198694 | Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems | Jeffry Davis, Randy Harris, David P. Mattson, James J. Erickson, Matthew Egloff | 2007-04-03 |
| 7147760 | Electroplating apparatus with segmented anode array | Kyle M. Hanson | 2006-12-12 |
| 7118658 | Electroplating reactor | Kyle M. Hanson | 2006-10-10 |
| 7087143 | Plating system for semiconductor materials | Wayne J. Schmidt, Robert W. Berner | 2006-08-08 |
| 7074246 | Modular semiconductor workpiece processing tool | Robert W. Berner, Wayne J. Schmidt, Kevin W. Coyle, Vladimir Zila, Worm Lund | 2006-07-11 |
| 7002698 | Semiconductor processing apparatus having lift and tilt mechanism | Kyle M. Hanson, Mark Dix, Vlad Zila | 2006-02-21 |
| 6991710 | Apparatus for manually and automatically processing microelectronic workpieces | Randy Harris | 2006-01-31 |
| 6976822 | End-effectors and transfer devices for handling microelectronic workpieces | James J. Erickson | 2005-12-20 |
| 6921467 | Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces | Kyle M. Hanson, Steve Eudy, Thomas Ritzdorf, Gregory J. Wilson, Randy Harris +4 more | 2005-07-26 |
| 6916412 | Adaptable electrochemical processing chamber | Kyle M. Hanson, Steve Eudy, Curtis Weber, Randy Harris | 2005-07-12 |
| 6890415 | Reactor vessel having improved cup, anode and conductor assembly | Kyle M. Hanson | 2005-05-10 |
| 6869510 | Methods and apparatus for processing the surface of a microelectronic workpiece | Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen, Vladimir Zila | 2005-03-22 |
| 6849167 | Electroplating reactor including back-side electrical contact apparatus | Kyle M. Hanson, Robert W. Batz, Jr., James T. Kuechmann | 2005-02-01 |
| 6773560 | Dry contact assemblies and plating machines with dry contact assemblies for plating microelectronic workpieces | John M. Pedersen, Jeremy Willey | 2004-08-10 |
| 6773559 | Processing apparatus including a reactor for electrochemically etching a microelectronic workpiece | Steve Eudy, James J. Erickson, Thomas H. Oberlitner, Matthew Egloff | 2004-08-10 |
| 6752584 | TRANSFER DEVICES FOR HANDLING MICROELECTRONIC WORKPIECES WITHIN AN ENVIRONMENT OF A PROCESSING MACHINE AND METHODS OF MANUFACTURING AND USING SUCH DEVICES IN THE PROCESSING OF MICROELECTRONIC WORKPIECES | Randy Harris | 2004-06-22 |
| 6749391 | Microelectronic workpiece transfer devices and methods of using such devices in the processing of microelectronic workpieces | Randy Harris | 2004-06-15 |
| 6749390 | Integrated tools with transfer devices for handling microelectronic workpieces | Randy Harris | 2004-06-15 |