| 7087143 |
Plating system for semiconductor materials |
Wayne J. Schmidt, Daniel J. Woodruff |
2006-08-08 |
$2,890,000 |
| 7074246 |
Modular semiconductor workpiece processing tool |
Daniel J. Woodruff, Wayne J. Schmidt, Kevin W. Coyle, Vladimir Zila, Worm Lund |
2006-07-11 |
$2,412,000 |
| 6960257 |
Semiconductor processing system with wafer container docking and loading station |
Raymon F. Thompson, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright, Darryl Byle |
2005-11-01 |
$2,584,000 |
| 6843894 |
Cathode current control system for a wafer electroplating apparatus |
Joseph J. Fatula, Jr., Robert Hitzfeld, Richard J. Contreras, Andrew Chiu |
2005-01-18 |
$1,908,000 |
| 6833035 |
Semiconductor processing system with wafer container docking and loading station |
Raymond F. Thompson, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright |
2004-12-21 |
$3,607,000 |
| 6805778 |
Contact assembly for supplying power to workpieces during electrochemical processing |
Robert W. Batz, Jr., Kenneth C. Haugan, Harry J. Geyer |
2004-10-19 |
$1,078,000 |
| 6627051 |
Cathode current control system for a wafer electroplating apparatus |
Joseph J. Fatula, Jr., Robert Hitzfeld, Richard J. Contreras, Andrew Chiu |
2003-09-30 |
$4,355,000 |
| 6461494 |
Methods for plating semiconductor workpieces using a workpiece-engaging electrode assembly with sealing boot |
Robert W. Batz, Jr., Kenneth C. Haugan, Harry J. Geyer |
2002-10-08 |
$1,997,000 |
| 6454926 |
Semiconductor plating system workpiece support having workpiece-engaging electrode with submerged conductive current transfer areas |
Thomas Ritzdorf, Jeffrey I. Turner |
2002-09-24 |
$1,058,000 |
| 6440178 |
Modular semiconductor workpiece processing tool |
Daniel J. Woodruff, Wayne J. Schmidt, Kevin W. Coyle, Vladimir Zila, Worm Lund |
2002-08-27 |
$1,500,000 |
| 6322674 |
Cathode current control system for a wafer electroplating apparatus |
Joseph J. Fatula, Jr., Robert Hitzfeld, Richard J. Contreras, Andrew Chiu |
2001-11-27 |
$1,267,000 |
| 6319841 |
Semiconductor processing using vapor mixtures |
Eric J. Bergman, David Oberlitner |
2001-11-20 |
$1,556,000 |
| 6203582 |
Modular semiconductor workpiece processing tool |
Daniel J. Woodruff, Wayne J. Schmidt, Kevin W. Coyle, Vladimir Zila, Worm Lund |
2001-03-20 |
$5,335,000 |
| 6162734 |
Semiconductor processing using vapor mixtures |
Eric J. Bergman, David Oberlitner |
2000-12-19 |
$6,147,000 |
| 6139703 |
Cathode current control system for a wafer electroplating apparatus |
Kyle M. Hanson, K. Chris Haugan, Kevin W. Coyle, James Doolittle |
2000-10-31 |
$7,893,000 |
| 6120641 |
Process architecture and manufacturing tool sets employing hard mask patterning for use in the manufacture of one or more metallization levels on a workpiece |
E. Henry Stevens |
2000-09-19 |
$8,529,000 |
| 6014817 |
Semiconductor wafer processing system |
Raymon F. Thompson, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright |
2000-01-18 |
$3,314,000 |
| 6004440 |
Cathode current control system for a wafer electroplating apparatus |
Kyle M. Hanson, K. Chris Haugan, Kevin W. Coyle, James Doolittle |
1999-12-21 |
$1,727,000 |
| 6001234 |
Methods for plating semiconductor workpieces using a workpiece-engaging electrode assembly with sealing boot |
Robert W. Batz, Jr., Kenneth C. Haugan, Harry J. Geyer |
1999-12-14 |
$3,296,000 |
| 5996241 |
Semiconductor wafer processing system with immersion module |
Raymon F. Thompson, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright |
1999-12-07 |
$2,932,000 |
| 5954911 |
Semiconductor processing using vapor mixtures |
Eric J. Bergman, David Oberlitner |
1999-09-21 |
$2,805,000 |
| 5882168 |
Semiconductor processing systems |
Raymon F. Thompson, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright |
1999-03-16 |
$909,000 |
| 5836736 |
Semiconductor processing system with wafer container docking and loading station |
Raymon F. Thompson, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright, Darryl Byle |
1998-11-17 |
$1,806,000 |
| 5788454 |
Semiconductor wafer processing system |
Raymon F. Thompson, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright |
1998-08-04 |
$1,807,000 |
| 5784797 |
Carrierless centrifugal semiconductor processing system |
Gary L. Curtis, Raymon F. Thompson, Ed Fix |
1998-07-28 |
$918,000 |