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Home › Process architecture and manufacturing tool sets employing hard mask patterning for use in the manufacture of one or more metallization levels on a workpiece

Process architecture and manufacturing tool sets employing hard mask patterning for use in the manufacture of one or more metallization levels on a workpiece

US Patent 6120641 · Granted Sep 19, 2000

Estimated economic value: $8,529,000 ⓘ

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